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arXiv 2206.01422cond-mat.mtrl-scicond-mat.mes-hallphysics.atm-clus
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Au(111)/ SiO2衬底上Si(OEt)4纳米沉积层的结构分析

Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at Nanometer Scale using Focused Electron Beam Induced Deposition

Po-Shi Yuan, Nigel Mason, Maria Pintea, Csarnovics István, Tamás Fodor

摘要:

聚焦电子束诱导沉积(FEBID)工艺通过采用具有1 keV和24 pA的束特性的Gemini SEM用于沉积高度在9 nm至lum之间且宽度在5 nm至0.5um之间的柱状和线状沉积物。已经分析了所有结构的组成,期望的Si:O:C含量为1:2:0。在空气中(室温下)保存的较老的沉积物中,结构的C含量超过60%,而年轻的沉积物(仅12小时)的C含量低于50%。使用Si(OEt)4在高速率下的沉积和低于0 ℃的沉积温度,获得了我们的结构的在10at%和15at%(组成百分比)之间的Si含量。FEBID结构已经沉积在SiO2晶片上的Au(111)上。选择Au(111)作为Si(OEt)4沉积的基底是由于其结构和形态性质,其表面颗粒化遵循Chevron图案,并且Au(111)缺陷随着O比率的增加和形状高度的降低而对结构的最终含量的组成变化具有更高的贡献。

英文摘要:

The focused electron beam induced deposition (FEBID) process was used by employing a Gemini SEM with a beam characteristic of 1keV and 24pA for the deposition of pillars and line shaped deposits with heights between 9nm to 1um and widths from 5nm to 0.5um. All structures have been analyzed to their composition looking at a desired Si : O : C content of 1: 2 : 0. The C content of the structure was found to be ~over 60% for older deposits kept in air (~at room temperature) and less than 50% for younger deposits, only 12 hours old. Using a deposition of Si(OEt)4 at high rates and a deposition temperature of under 0 degC, an Si content of our structure between 10at% and 15at% (compositional percentage) was obtained. The FEBID structures have been deposited on Au(111) over an SiO2 wafer. The Au(111) was chosen as a substrate for the deposition of Si(OEt)4 due to its structural and morphological properties, with its surface granulation following a Chevron pattern, and the Au(111) defects having a higher contribution to the change in the composition of the final content of the structure with the increase in O ratio and a reduction in the shapes heights.

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