聚甲基丙烯酸甲酯-钯团簇纳米复合材料的超音速团簇束沉积：polymer表面微结构金属化方法
Poly(methyl methacrylate) - Palladium clusters nanocomposite formation by supersonic cluster beam deposition: a method for microstructured metallization of polymer surfaces
摘要：
采用超音速团簇束沉积（SCBD）技术在聚甲基丙烯酸甲酯（PMMA）表面制备了钯团簇纳米复合薄膜。电导率随团簇覆盖率的变化和显微镜分析表明，Pd团簇被注入聚合物中，并在聚合物表面下形成了一个延伸数十纳米的连续层。这允许沉积，使用模板掩模，簇组装的Pd微结构在PMMA上显示出非常高的粘附力相比，通过热蒸发获得的金属膜。这些结果表明，SCBD是一种很有前途的工具，在柔性聚合物基板上的金属微结构的制造。
英文摘要：
Nanocomposite films were fabricated by supersonic cluster beam deposition (SCBD) of palladium clusters on Poly(methyl methacrylate) (PMMA) surfaces. The evolution of the electrical conductance with cluster coverage and microscopy analysis show that Pd cluster are implanted in the polymer and form a continuous layer extending for several tens of nanometers beneath the polymer surface. This allows the deposition, using stencil masks, of cluster-assembled Pd microstructures on PMMA showing a remarkably high adhesion compared to metallic films obtained by thermal evaporation. These results suggest that SCBD is a promising tool for the fabrication of metallic microstructures on flexible polymeric substrates.
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