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arXiv 2202.00952physics.ins-detcond-mat.mes-hall
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提高原子力显微镜平面探针灵敏度的研究

Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes

H. Tunç Çiftçi, Michael Verhage, Tamar Cromwijk, Laurent Pham Van, Bert Koopmans, Kees Flipse, Oleg Kurnosikov

摘要:

我们提出了一种新的方法,以音叉为基础的原子力显微镜利用先进的“尖芯片”探针具有高灵敏度和广泛的兼容性。通常,这种尺寸达到2 mm x 2 mm的芯片状探针会极大地干扰音叉的振荡,导致其内在力感测性能较差。因此,恢复初始振荡特性对于恢复高灵敏度是必要的。为此,我们开发了一种新的方法,包括三个基本步骤:音叉再平衡,改造持有人传感器固定,和电极重新配置。质量再平衡允许音叉恢复频率并重新获得高Q值,在空气中高达10E4,在超高真空条件下高达4 x 10E4。使用软线的浮动式保持器固定显著地减少了来自安装元件的能量耗散。与软导线相结合,重新配置的电极提供了对芯片状探针的电访问,而不会干预力感测信号。最后,我们易于实施的方法允许转换的原子力显微镜尖端从一个被动的工具,一个专用的微型设备具有扩展的功能。

英文摘要:

We present a new approach to tuning fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 mm x 2 mm drastically perturb the oscillation of the tuning fork, resulting in poor performance in its intrinsic force sensing. Therefore, restoring initial oscillatory characteristics is necessary for regaining high sensitivity. To this end, we developed a new approach consisting of three basic steps: tuning fork rebalancing, revamping holder-sensor fixation, and electrode reconfiguration. Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10E4 in air and up to 4 x 10E4 in ultra-high vacuum conditions. The floating-like holder-fixation using soft wires significantly reduces energy dissipation from the mounting elements. Combined with the soft wires, reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal. Finally, our easy-to-implement approach allows converting the atomic force microscopy-tip from a passive tool to a dedicated microdevice with extended functionality.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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