扫描探针显微镜针尖计量的正则化盲针尖重建算法
The regularized blind tip reconstruction algorithm as a scanning probe microscopy tip metrology method
摘要：
精确的针尖半径和形状表征的问题是非常重要的表面的机械和化学性能的扫描探针显微镜测量的基础上确定。我们认为，最有利的方法，用于此目的是盲目的尖端重建方法，因为他们不需要任何校准的表征，并可能会执行一个普通的SPM设置。正如在许多其他反问题中一样，在这些方法的情况下，存在振动和电子噪声的解的稳定性需要应用所谓的正则化技术。本文提出了一种新的正则化技术（正则化盲端重建- RBTR）的盲端重建算法。它提高了各向同性和各向异性噪声的存在下的解决方案的质量。我们的方法的优越性证明了计算机模拟和分析的基础上的预算传感器TipCheck校准标准的图像。在表征的情况下，真正的AFM探针作为参考方法的高分辨率扫描电子显微镜被选择，我们获得了良好的定性对应的两种方法。
英文摘要：
The problem of an accurate tip radius and shape characterization is very important for determination of surface mechanical and chemical properties on the basis of the scanning probe microscopy measurements. We think that the most favorable methods for this purpose are blind tip reconstruction methods, since they do not need any calibrated characterizers and might be performed on an ordinary SPM setup. As in many other inverse problems also in case of these methods the stability of the solution in presence of vibrational and electronic noise needs application of so called regularization techniques. In this paper the novel regularization technique (Regularized Blind Tip Reconstruction - RBTR) for blind tip reconstruction algorithm is presented. It improves the quality of the solution in presence of isotropic and anisotropic noise. The superiority of our approach is proved on the basis of computer simulations and analysis of images of the Budget Sensors TipCheck calibration standard. In case of characterization of real AFM probes as a reference method the high resolution scanning electron microscopy was chosen and we obtain good qualitative correspondence of both methods.
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