用于扫描离子电导显微镜的高速XYZ纳米定位器
High-speed XYZ-nanopositioner for scanning ion conductance microscopy
摘要：
我们描述了一个尖端扫描型高速XYZ纳米定位器设计的扫描离子电导显微镜（SICM），与一个特殊的照顾是致力于纳米移液管举行的方式。纳米移液管探针安装在中空压电致动器的中心，其两端连接到相同的膜片弯曲部，用于Z定位。这种设计最大限度地减少了不希望的机械振动的产生。机械放大用于增加纳米定位器的XY行程范围。纳米定位器的第一共振频率分别测量为Z位移和XY位移的$\sim$ 100 kHz和$\sim$ 2.3 kHz。Z和XY的行程范围分别为$\sim$ 6 $μ$ m和$\sim$ 34 $μ$ m。当该纳米定位器用于具有$\sim$ 10 nm半径尖端的SICM的跳跃模式成像时，垂直尖端速度可以增加到400 nm/ms;因此，一个像素的采集时间可以最小化到$\sim$ 1 ms。
英文摘要：
We describe a tip-scan-type high-speed XYZ-nanopositioner designed for scanning ion conductance microscopy (SICM), with a special care being devoted to the way of nanopipette holding. The nanopipette probe is mounted in the center of a hollow piezoactuator, both ends of which are attached to identical diaphragm flexures, for Z-positioning. This design minimizes the generation of undesirable mechanical vibrations. Mechanical amplification is used to increase the XY-travel range of the nanopositioner. The first resonance frequencies of the nanopositioner are measured as $\sim$100 kHz and $\sim$2.3 kHz for the Z- and XY-displacements, respectively. The travel ranges are $\sim$6 $μ$m and $\sim$34 $μ$m for Z and XY, respectively. When this nanopositioner is used for hopping mode imaging of SICM with a $\sim$10-nm radius tip, the vertical tip velocity can be increased to 400 nm/ms; hence, the one-pixel acquisition time can be minimized to $\sim$1 ms.
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