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arXiv 2201.05379cond-mat.mtrl-sci
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热、弹性和表面性质对SiC多型体稳定性的影响

Effects of thermal, elastic, and surface properties on the stability of SiC polytypes

Senja Ramakers, Anika Marusczyk, Maximilian Amsler, Thomas Eckl, Matous Mrovec, Thomas Hammerschmidt, Ralf Drautz

摘要:

SiC多型体已经研究了几十年,无论是实验还是原子模拟,但在决定其稳定性和生长的因素上尚未达成共识。建议的控制因素是温度依赖的差异,在体能量,双轴应变诱导通过点缺陷,和表面性能。本文采用密度泛函理论研究了3C、2 H、4 H和6 H多型体的热力学稳定性。多型体之间的体积能量的微小差异可能导致其能量排序的复杂变化,这取决于计算方法。因此,我们采用和比较各种DFT代码:VASP,CP 2K和FHI目标;交换相关泛函:LDA,PBE,PBESol,PW 91,HSE 06,SCAN和RTPSS;和九种不同的范德华(vdW)校正。在$T=0$ ~K,4 H-SiC比3C-SiC稍微更稳定,并且通过包括来自晶格振动的熵效应,稳定性进一步随温度增加。无论是最先进的vdW校正,也没有应变的晶格上的相对多型稳定性有显着的影响。我们进一步研究的(0001)多型表面,通常暴露在外延生长过程中的能量。对于Si终止的表面,我们发现3C-SiC是显着更稳定的比4 H-SiC。我们得出结论,表面能的差异可能是3C-成核的驱动力,而在体热力学稳定性的差异略有有利于4 H和6 H多型体。为了正确描述晶体生长过程中的多型体稳定性,因此至关重要的是要考虑到这两种影响。

英文摘要:

SiC polytypes have been studied for decades, both experimentally and with atomistic simulations, yet no consensus has been reached on the factors that determine their stability and growth. Proposed governing factors are temperature-dependent differences in the bulk energy, biaxial strain induced through point defects, and surface properties. In this work, we investigate the thermodynamic stability of the 3C, 2H, 4H, and 6H polytypes with density functional theory (DFT) calculations. The small differences of the bulk energies between the polytypes can lead to intricate changes in their energetic ordering depending on the computational method. Therefore, we employ and compare various DFT-codes: VASP, CP2K, and FHI-aims; exchange-correlation functionals: LDA, PBE, PBEsol, PW91, HSE06, SCAN, and RTPSS; and nine different van der Waals (vdW) corrections. At $T=0$~K, 4H-SiC is marginally more stable than 3C-SiC, and the stability further increases with temperature by including entropic effects from lattice vibrations. Neither the most advanced vdW corrections nor strain on the lattice have a significant effect on the relative polytype stability. We further investigate the energies of the (0001) polytype surfaces that are commonly exposed during epitaxial growth. For Si-terminated surfaces, we find 3C-SiC to be significantly more stable than 4H-SiC. We conclude that the difference in surface energy is likely the driving force for 3C-nucleation, whereas the difference in the bulk thermodynamic stability slightly favors the 4H and 6H polytypes. In order to describe the polytype stability during crystal growth correctly, it is thus crucial to take into account both of these effects.

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