In display technologies or data processing, planar and subwavelength free-space components suited for flat photonic devices are needed. Metasurfaces, which shape the optical wavefront within hundreds of nanometers, can provide a solution for thin and portable photonic devices, e.g. as CMOS-compatible modules. While conventional electro-optic modulators are inconvenient to operate in free space configurations, its principle can largely be applied to the development of active metasurfaces with the prospect of modulation speeds up to the GHz region. Here, we use this concept to realize fast and continuous modulation of light at low voltage and MHz speed with a lithium niobate metasurface tuned by the linear electro-optic effect. Furthermore, we exploit the resonance in the visible to enhance the modulation of the transmitted light by two orders of magnitude, namely by a factor of 80, compared to the unstructured substrate. This proof-of-concept work is a first important step towards the use of lithium niobate metasurfaces for free space modulation.
Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we design and computationally investigate high quality factor silicon-on-lithium niobate metasurfaces with electrically-driven, independent control of its constituent nanobars for full phase tunability with high tuning efficiency. Free-space light couples to guided modes within each nanobar via periodic perturbations, generating quality factors exceeding 30,000, while maintaining bar spacing <$λ$/1.5. We achieve nearly 2$π$ phas…
Many applications of metasurfaces require an ability to dynamically change their properties in time domain. Electrical tuning techniques are of particular interest, since they pave a way to on-chip integration of metasurfaces with optoelectronic devices. In this work, we propose and experimentally demonstrate an electro-optic lithium niobate (EO-LN) metasurface that shows dynamic modulations to phase retardation of transmitted light. Quasi-bound states in the continuum (QBIC) are observed from our metasurface. And by applying external electric voltages, the refractive index of the LN is change…
Lithium niobate is a multi-functional material, which has been regarded as one of the most promising platform for the multi-purpose optical components and photonic circuits. Targeting at the miniature optical components and systems, lithium niobate microstructures with feature sizes of several to hundreds of micrometers have been demonstrated, such as waveguides, photonic crystals, micro-cavities, and modulators, et al. In this paper, we presented subwavelength nanograting metasurfaces fabricated in a crystalline lithium niobate film, which hold the possibilities towards further shrinking the …
Second harmonic generation (SHG) is a coherent nonlinear phenomenon that plays an important role in laser color conversion. Lithium niobate (LN), which features both a large band gap and outstanding second-order nonlinearities, acts as an important optical material for nonlinear frequency conversion covering a wide spectral range from ultraviolet to mid-infrared. Here we experimentally demonstrate LN metasurfaces with controllable SHG properties. Distinct enhancements for the SHG efficiency are observed at Mie-resonances. And by changing the geometric parameters thus the resonances of the meta…
Electro-optical modulation of light polarization in a nonlocal lithium niobate metasurface
Politecnico di Milano（米兰理工大学）；EPFL, Insitute of Mechanical Engineering, Laboratory of Nanoscience for Energy Technologies（洛桑联邦理工学院机械工程学院纳米能源技术实验室）；ETH Zürich, Department of Physics, Institute for Quantum Electronics（苏黎世联邦理工学院物理系量子电子研究所）；Università di Brescia（布雷西亚大学）
Electro-optically tunable second-harmonic generation in lithium niobate metasurfaces boosted by Brillouin zone folding induced bound states in the continuum
Metasurfaces consisting of nano-scale structures are underpinning new physical principles for the creation and shaping of quantum states of light. Multi-photon states that are entangled in spatial or angular domains are an essential resource for quantum imaging and sensing applications, however their production traditionally relies on bulky nonlinear crystals. We predict and demonstrate experimentally the generation of spatially entangled photon pairs through spontaneous parametric down-conversion from a metasurface incorporating a nonlinear thin film of lithium niobate. This is achieved throu…
The rapid development of metasurfaces - 2D ensembles of engineered nanostructures - is presently fostering a steady drive towards the miniaturization of many optical functionalities and devices to a subwavelength size. The material platforms for optical metasurfaces are rapidly expanding and for the past few years, we are seeing a surge in establishing meta-optical elements from high-index, highly transparent materials with strong nonlinear and electro-optic properties. Crystalline lithium niobate (LN), a prime material of choice in integrated photonics, has shown great promise for future meta…
Dynamic optical metasurfaces with ultrafast temporal response, i.e., spatiotemporal optical metasurfaces, provide attractive solutions and open fascinating perspectives for modern highly integrated optics and photonics. In this work, electro-optically controlled optical metasurfaces operating in reflection and utilizing resonant waveguide mode excitation are demonstrated from the viewpoint of free-space propagating light modulation. The modulation of reflected light power with superior characteristics in comparison with prior research is achieved by identifying a suitable low-loss waveguide mo…
Optical metasurfaces have been extensively investigated, demonstrating diverse and multiple functionalities with complete control over the transmitted and reflected fields. Most optical metasurfaces are however static, with only a few configurations offering (rather limited) electrical control, thereby jeopardizing their application prospects in emerging flat optics technologies. Here, we suggest an approach to realize electrically tunable optical metasurfaces, demonstrating dynamic Fresnel lens focusing. The active Fresnel lens (AFL) exploits the electro-optic Pockels effect in a 300-nm-thick…
Electro-optic modulators with low voltage and large bandwidth are crucial for both analog and digital communications. Recently, thin-film lithium niobate modulators have enable dramatic performance improvements by reducing the required modulation voltage while maintaining high bandwidths. However, the reduced electrode gaps in such modulators leads to significantly higher microwave losses, which limit electro-optic performance at high frequencies. Here we overcome this limitation and achieve a record combination of low RF half-wave voltage of 1.3 V while maintaining electro-optic response with…
We propose and demonstrate a polarization-insensitive and high speed optical switch unit based on a silicon and lithium niobate hybrid integration platform. The presented device exhibits a sub nano-second switching time, low drive voltages of 4.97 V, and low power dissipation due to electrostatic operation. The measured polarization dependence loss was lower than 0.8 dB. The demonstrated optical switch could provide as a building block for polarization-insensitive and high-speed optical matrix switches.
All-dielectric optical metasurfaces are a workhorse in nano-optics due to both their ability to manipulate light in different degrees of freedom and their excellent performance at light frequency conversion. Here, we demonstrate first-time generation of photon pairs via spontaneous parametric-down conversion in lithium niobate quantum optical metasurfaces with electric and magnetic Mie-like resonances at various wavelengths. By engineering the quantum optical metasurface, we tailor the photon-pair spectrum in a controlled way. Within a narrow bandwidth around the resonance, the rate of pair pr…
We demonstrate efficient tuning of a monolithically integrated lithium niobate microdisk (LN) optical frequency microcomb. Utilizing the high optical quality (Q) factor (i.e., Q~7.1*10^6) of the microdisk, the microcomb spans over a spectral bandwidth of ~200 nm at a pump power as low as 20.4 mW. Combining the large eletro-optic coefficient of LN and optimum design of the geometry of microelectrodes, we demonstrate electro-optical tuning of the comb with a spectral range of 400 pm and a tuning efficiency of ~38 pm/100V.
Integrated thin-film lithium niobate (LN) electro-optic (EO) modulators of broad bandwidth, low insertion loss, low cost and high production rate are essential elements in contemporary inter-connection industries and disruptive applications. Here, we demonstrated the design and fabri-cation of a high performance thin-film LN EO modulator using photolithography assisted chemo-mechanical etching (PLACE) technology. Our device shows a 3-dB bandwidth over 50 GHz, along with a comparable low half wave voltage-length product of 2.16 Vcm. We obtain a fiber-to-fiber insertion loss of 2.6 dB.
Segmented, or slow-wave electrodes have emerged as an index-matching solution to improve bandwidth of traveling-wave Mach Zehnder and phase modulators on the thin-film lithium niobate on insulator platform. However, these devices require the use of a quartz handle or substrate removal, adding cost and additional processing. In this work, a high-speed dual-output electro-optic intensity modulator in the thin-film silicon nitride and lithium niobate material system that uses segmented electrodes for RF and optical index matching is presented. The device uses a silicon handle and does not require…
A high-resolution broad-spectral-bandwidth spectrometer on a chip would create new opportunities for gas-phase molecular fingerprinting, especially in environmental sensing. A resolution high enough to observe transitions at atmospheric pressure and the simultaneous sensitive detection of multiple atoms or molecules are the key challenges. Here, an electro-optic microring-based dual-comb interferometer, fabricated on a low-loss lithium-niobate-on-insulator nanophotonic platform, demonstrates significant progress towards such an achievement. Spectra spanning 1.6 THz (53 cm-1) at a resolution of…
We demonstrate monolithic integration of an electro-optically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching (PLACE), and the pump laser is evanescently coupled into the erbium (Er3+) doped LN microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as 1.54x10^5 at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser…
Integrated lithium niobate (LN) photonics is a promising platform for future chip-scale microwave photonics systems owing to its unique electro-optic properties, low optical loss and excellent scalability. A key enabler for such systems is a highly linear electro-optic modulator that could faithfully covert analog electrical signals into optical signals. In this work, we demonstrate a monolithic integrated LN modulator with an ultrahigh spurious-free dynamic range (SFDR) of 120.04 dB Hz4/5 at 1 GHz, using a ring-assisted Mach-Zehnder interferometer configuration. The excellent synergy between …
Recent advances in the processing of thin-film LNOI have enabled low-loss photonic integrated circuits, modulators with improved half-wave voltage, electro-optic frequency combs and novel on-chip electro-optic devices, with applications ranging from 5G telecommunication and microwave photonics to microwave-to-optical quantum interfaces. Lithium niobate integrated photonic circuits could equally be the basis of integrated narrow-linewidth frequency-agile lasers. Pioneering work on polished lithium niobate crystal resonators has led to the development of electrically tunable narrow-linewidth las…
Integrated photonics operating at visible-near-infrared (VNIR) wavelengths offer scalable platforms for advancing optical systems for addressing atomic clocks, sensors, and quantum computers. The complexity of free-space control optics causes limited addressability of atoms and ions, and this remains an impediment on scalability and cost. Networks of Mach-Zehnder interferometers can overcome challenges in addressing atoms by providing high-bandwidth electro-optic control of multiple output beams. Here, we demonstrate a VNIR Mach-Zehnder interferometer on lithium niobate on sapphire with a CMOS…
Molding the flow of light at the nanoscale has been a grand challenge of nanophotonics for decades. It is now widely recognized that metasurfaces represent a chip-scale nanophotonics array technology capable of comprehensively controlling the wavefront of light via appropriately configuring subwavelength antenna elements. Here, we demonstrate a reconfigurable metasurface that is universal, i.e., notionally capable of providing diverse optical functions in the telecommunication wavelength regime, using a compact, lightweight, electronically-controlled array with no moving parts. By electro-opti…
Superconducting cavity electro-optics (EO) presents a promising route to coherently convert microwave and optical photons and distribute quantum entanglement between superconducting circuits over long-distance through an optical network. High EO conversion efficiency demands transduction materials with strong Pockels effect and excellent optical transparency. Thin-film Lithium Niobate (TFLN) offers these desired characteristics however so far has only delivered unidirectional conversion with efficiencies on the order of $10^{-5}$, largely impacted by its prominent photorefractive (PR) effect a…
Many technologies in quantum photonics require cryogenic conditions to operate. However, the underlying platform behind active components such as switches, modulators and phase shifters must be compatible with these operating conditions. To address this, we demonstrate an electro-optic polarisation converter for 1550nm light at 0.8K in titanium in-diffused lithium niobate waveguides. To do so, we exploit the electro-optic properties of lithium niobate to convert between orthogonal polarisation modes with a fiber-to-fiber transmission >43%. We achieve a modulation depth of 23.6 +/-3.3dB and a c…
We investigate the dependence of photonic waveguide propagation loss on the thickness of the buried oxide layer in Y-cut lithium niobate on insulator substrate to identify trade-offs between optical losses and electromechanical coupling of surface acoustic wave (SAW) devices for acousto-optic applications. Simulations show that a thicker oxide layer reduces the waveguide loss but lowers the electromechanical coupling coefficient of the SAW device. Optical racetrack resonators with different lengths were fabricated by argon plasma etching to experimentally extract waveguide losses. By increasin…
Thin-film lithium niobate (LN) photonic integrated circuits (PICs) could enable ultrahigh performance in electro-optic and nonlinear optical devices. To date, realizations have been limited to chip-scale proof-of-concepts. Here we demonstrate monolithic LN PICs fabricated on 4- and 6-inch wafers with deep ultraviolet lithography and show smooth and uniform etching, achieving 0.27 dB/cm optical propagation loss on wafer-scale. Our results show that LN PICs are fundamentally scalable and can be highly cost-effective.
Photonic-based low-phase-noise microwave generation with real-time frequency tuning is crucial for a broad spectrum of subjects, including next-generation wireless communications, radar, metrology, and modern instrumentation. Here, for the first time to the best of our knowledge, narrow-bandwidth dual-wavelength microlasers are generated from nearly degenerate polygon modes in a high-Q active lithium niobate microdisk. The high-Q polygon modes formation with independently controllable resonant wavelengths and free spectral ranges is enabled by the weak perturbation of the whispering gallery mi…
Lithium niobate (LN) is an excellent nonlinear optical and electro-optic material that has found many applications in classical nonlinear optics, optical fiber communications and quantum photonics. Here we review the recent development of thin-film LN technology that has allowed the miniaturization of LN photonic devices and microcavities with ultrahigh quality factors. We discuss the design principle of LN devices that makes use of the largest nonlinear coefficients, various device fabrication approaches and resulting device performances, and the current and potential applications of LN micro…
This paper presents space-time varying (STV) metasurfaces for simultaneously controlling the spatial and temporal spectra of electromagnetic waves. These metasurfaces transform incident electromagnetic waves into specified reflected and transmitted waves, with arbitrary temporal and spatial frequencies. They are synthesized in terms of time-domain generalized sheet transition conditions (GSTCs). Moreover, they are characterized using an analytical method and the unstaggered finite-difference time-domain (FDTD) technique adapted to space-time metasurfaces. STV metasurfaces performing pulse shap…
Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 dB/cm in communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974-nm continuous laser. This work develops new active devices on LNOI and will promote the development of LNOI integrated photonics.
