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arXiv 2106.09337cond-mat.mes-hall
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利用片上设计提高扫描SQUID显微镜的空间分辨率

Improving spatial resolution of scanning SQUID microscopy with an on-chip design

Y. P. Pan, J. J. Zhu, Y. Feng, Y. S. Lin, H. B. Wang, X. Y. Liu, H. Jin, Z. Wang, L. Chen, Y. H. Wang

摘要:

扫描超导量子干涉器件显微镜(sSQUID)是目前在介观尺度上直接、灵敏地进行磁通量成像的最有效方法之一。SQUID片上设计允许在梯度仪设置中集成磁场线圈以进行磁测量,这对于测量量子物质的磁响应是非常理想的。然而,由于难以接近样品,这种设计的空间分辨率在很大程度上限于微米。在这里,我们使用电子束光刻技术在三维纳米桥基SQUID器件的制造中制备直径低至150 nm的拾波线圈。此外,我们整合了深硅蚀刻工艺,以最大限度地减少拾取线圈和晶圆边缘之间的距离。结合基于音叉的扫描头,蚀刻芯片边缘的锐度可实现5 nm的高度控制精度。通过使用这些改进的SQUID设备对铌棋盘样品进行扫描测量,我们在磁力测量和磁阻测量中展示了亚微米的空间分辨率,明显优于我们前几代的纳米SQUID。这种SQUID片上空间分辨率的提高对于各种模式下的量子材料和器件的磁成像是一个有价值的进展。

英文摘要:

Scanning superconducting quantum interference device microscopy (sSQUID) is currently one of the most effective methods for direct and sensitive magnetic flux imaging on the mesoscopic scale. A SQUID-on-chip design allows integration of field coils for susceptometry in a gradiometer setup which is very desirable for measuring magnetic responses of quantum matter. However, the spatial resolution of such a design has largely been limited to micrometers due to the difficulty in approaching the sample. Here, we used electron beam lithography technology in the fabrication of the 3D nano-bridge-based SQUID devices to prepare pick-up coils with diameters down to 150 nm. Furthermore, we integrated the deep silicon etching process in order to minimize the distance between the pick-up coil and the wafer edge. Combined with a tuning-fork-based scanning head, the sharpness of the etched chip edge enables a precision of 5 nm in height control. By scanning measurements on niobium chessboard samples using these improved SQUID devices, we demonstrate sub-micron spatial resolutions in both magnetometry and susceptometry, significantly better than our previous generations of nano-SQUIDs. Such improvement in spatial resolution of SQUID-on-chip is a valuable progress for magnetic imaging of quantum materials and devices in various modes.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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