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arXiv 2101.00465cond-mat.mtrl-scicond-mat.mes-hallcond-mat.str-el
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电子重叠关联成像达到了晶格振动所设定的原子分辨率极限

Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Zhen Chen, Yi Jiang, Yu-Tsun Shao, Megan E. Holtz, Michal Odstrčil, Manuel Guizar-Sicairos, Isabelle Hanke, Steffen Ganschow, Darrell G. Schlom, David A. Muller

摘要:

透射电子显微镜使用波长为几皮米的电子,潜在地能够以最终由原子的固有尺寸设定的分辨率对固体中的单个原子进行成像。不幸的是,由于成像透镜的缺陷和样品中电子的多次散射,所达到的图像分辨率要差3到10倍。在这里,通过逆解决多重散射问题,克服像差的电子探针,使用电子重叠关联,以恢复在厚样品中的线性相位响应,我们证明了一个仪器的模糊下20皮米。测量的静电势中原子柱的宽度现在不再受成像系统的限制,而是受原子的热波动的限制。我们还表明,电子重叠可以潜在地达到一个亚纳米的深度分辨率和定位嵌入的原子掺杂剂在所有三个维度,只有一个单一的投影测量。

英文摘要:

Transmission electron microscopes use electrons with wavelengths of a few picometers, potentially capable of imaging individual atoms in solids at a resolution ultimately set by the intrinsic size of an atom. Unfortunately, due to imperfections in the imaging lenses and multiple scattering of electrons in the sample, the image resolution reached is 3 to 10 times worse. Here, by inversely solving the multiple scattering problem and overcoming the aberrations of the electron probe using electron ptychography to recover a linear phase response in thick samples, we demonstrate an instrumental blurring of under 20 picometers. The widths of atomic columns in the measured electrostatic potential are now no longer limited by the imaging system, but instead by the thermal fluctuations of the atoms. We also demonstrate that electron ptychography can potentially reach a sub-nanometer depth resolution and locate embedded atomic dopants in all three dimensions with only a single projection measurement.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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