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arXiv 2009.01627cond-mat.mtrl-sci
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4H-SiC高氮原子密度层结构和各向异性的第一性原理研究

First-principles study on structure and anisotropy of high N-atom density layer in 4H-SiC

Mitsuharu Uemoto, Naoki Komatsu, Yoshiyuki Egami, Tomoya Ono

摘要:

采用氮化退火工艺降低了界面陷阱态,降低了4H-SiC/SiO ${}_2$金属氧化物半导体场效应晶体管的沟道迁移率。在最近的实验中,高N-原子密度层在退火界面处的存在被报道,并且已知它们的浓度在晶面中是各向异性的。到目前为止,原子结构和周围的氮化退火过程中纳入的N原子的各向异性的起源的电子状态的作用还没有得到很好的理解。在这项工作中,我们提出了一个简化的原子尺度模型结构的4H-SiC与高N原子密度层($\sim 10^{15}~\mathrm{atom}/\mathrm{cm}^2$),这是实验观察的顺序。我们使用块体4H-SiC作为主体晶体,并考虑在准立方-($k$-)和六方-($h$-)位置上的N原子结合结构的几组原子构型的$a$-,$m$-和Si-(C-)平面。基于密度泛函理论计算,我们研究了能量稳定性对分布方向的影响。虽然我们的体模型是简化相比,现实的界面结构,我们确认模型之间的显着差异,并观察到N原子上的$a$面的掺入是稳定的。此外,从电子态的分析,我们认为,这种形成能的各向异性起源于由于N-原子纳入结构的几何构型的差异而导致的配位数的变化。

英文摘要:

A nitridation annealing process is well employed to reduce interface trap states that degrade the channel mobility of 4H-SiC/SiO${}_2$ metal-oxide-semiconductor field-effect transistor. In recent experiments, the existence of high N-atom density layers at the annealed interface is reported and their concentrations are known to be anisotropic in the crystal planes. Until now, the role of atomic structure and the electronic states surrounding the N atoms incorporated by the nitridation annealing process on the origin of anisotropy is not well understood. In this work, we propose a simplified atomic-scale model structure of 4H-SiC with the a high N-atom density layer ($\sim 10^{15}~\mathrm{atom}/\mathrm{cm}^2$), which is of the order of the experimental observation. We use bulk 4H-SiC as host crystal and consider several sets of the atomic configurations of the N-atom incorporated structure at the quasi cubic-($k$-) and hexagonal-($h$-)sites on $a$-, $m$-, and Si-(C-)planes. Based on the density functional theory calculations, we investigate the influence of the energy stability on the distribution directions. Although our bulk model is simplified compared to the realistic interface structures, we confirm significant difference among models and observe that the incorporation of N atoms on the $a$-face is stable. Furthermore, from the analysis of the electronic states, we suggest that this anisotropy of the formation energy originates from the change of the coordinating number due to the difference in geometric configurations of the N-atom incorporated structures.

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