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arXiv 2008.00576physics.app-phcond-mat.mes-hall
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确定MOSFET阈值电压的广义恒流法

Generalized Constant Current Method for Determining MOSFET Threshold Voltage

Matthias Bucher, Nikolaos Makris, Loukas Chevas

摘要:

提出了一种新的方法,用于提取MOSFET在各反型级恒流偏置下的阈值电压和衬底效应参数。这种广义恒流(GCC)方法利用MOSFET的基于电荷的模型来提取阈值电压和其他与衬底效应相关的参数。该方法适用范围广,适用于弱、中逆温区,对强逆温区也有一定的适用性。当应用于在使用浅沟槽隔离(STI)的CMOS工艺中呈现边缘传导效应(亚阈值驼峰)的MOSFET时,该方法特别有用。

英文摘要:

A novel method for extracting threshold voltage and substrate effect parameters of MOSFETs with constant current bias at all levels of inversion is presented. This generalized constant-current (GCC) method exploits the charge-based model of MOSFETs to extract threshold voltage and other substrate-effect related parameters. The method is applicable over a wide range of current throughout weak and moderate inversion and to some extent in strong inversion. This method is particularly useful when applied for MOSFETs presenting edge conduction effect (subthreshold hump) in CMOS processes using Shallow Trench Isolation (STI).

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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