用于图像扫描显微镜的SPAD阵列探测器
SPAD-based asynchronous-readout array detectors for image-scanning microscopy
摘要：
荧光显微镜和衍生技术正在不断寻找能够保证增加的灵敏度，高空间和时间分辨率和易于集成到现代显微镜架构的光电探测器。单光子雪崩二极管（SPAD）的最新进展与行业标准的微电子工艺制造允许开发新的检测系统，以满足先进的成像技术（如图像扫描显微镜）的要求。为了这个目的，我们提出了完整的设计和表征的两个二维SPAD阵列组成的25个完全独立的和challengously操作的像素，都具有填充因子约50%，专门设计用于集成到现有的激光扫描显微镜。我们使用两种不同的微电子技术来制造我们的探测器：第一种技术表现出非常低的噪声（在室温下每秒约200个暗计数），第二种技术表现出更高的探测效率（在500 nm波长下超过60%）。从硅级器件结构开始，并朝着像素和读出电子描述，我们提出了两种探测器之间的性能评估和比较。将其集成到我们的定制图像扫描显微镜后获得的生物样品图像最终展示了其在空间分辨率和对比度增强方面的精湛现场性能。我们设想，这项工作可以触发一类新的SPAD为基础的检测器阵列的发展，能够取代荧光激光扫描显微镜中使用的典型的单元素传感器。
英文摘要：
Fluorescence microscopy and derived techniques are continuously looking for photodetectors able to guarantee increased sensitivity, high spatial and temporal resolution and ease of integration into modern microscopy architectures. Recent advances in single photon avalanche diodes (SPADs) fabricated with industry-standard microelectronic processes allow the development of new detection systems tailored to address the requirements of advanced imaging techniques (such as image-scanning microscopy). To this aim, we present the complete design and characterization of two bidimensional SPAD arrays composed of 25 fully independent and asynchronously-operated pixels, both having fill-factor of about 50% and specifically designed for being integrated into existing laser scanning microscopes. We used two different microelectronics technologies to fabricate our detectors: the first technology exhibiting very low noise (roughly 200 dark counts per second at room temperature), and the second one showing enhanced detection efficiency (more than 60% at a wavelength of 500 nm). Starting from the silicon-level device structures and moving towards the in pixel and readout electronics description, we present performance assessments and comparisons between the two detectors. Images of a biological sample acquired after their integration into our custom image-scanning microscope finally demonstrate their exquisite on-field performance in terms of spatial resolution and contrast enhancement. We envisage that this work can trigger the development of a new class of SPAD-based detector arrays able to substitute the typical single-element sensor used in fluorescence laser scanning microscopy.
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