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arXiv 1909.04478physics.app-phphysics.ins-detphysics.optics
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迈向完全集成的光子位移传感器

Towards fully integrated photonic displacement sensors

Ankan Bag, Martin Neugebauer, Uwe Mick, Silke Christiansen, Sebastian A Schulz, Peter Banzer

备注：
Ankan and Martin contributed equally, 6 pages, 5 figures
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摘要：

具有高精度位置、旋转和波前传感器的光学计量领域代表了光刻和高分辨率显微镜的基础。然而，芯片上的集成-一项与未来纳米技术设备高度相关的任务-需要通过部署新的概念来减少感测方案的空间足迹。实现这一目标的一个有希望的途径是预测基本上最小的光发射器，即偶极子，作为一个指标的可控方向发射。在这里，我们实现了一个集成的位移传感器的基础上，在一个单独的偶极天线激发惠更斯偶极子的定向发射。天线相对于激发场的位置决定了其到光子晶体波导的六向交叉中的定向耦合。在我们的实验研究支持的理论计算，我们展示了第一个原型的集成位移传感器的位置精度低于$λ$ /300在室温和环境条件下的标准偏差。

英文摘要：

The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration - a task highly relevant for future nanotechnological devices - necessitates the reduction of the spatial footprint of sensing schemes by the deployment of novel concepts. A promising route towards this goal is predicated on the controllable directional emission of the fundamentally smallest emitters of light, i.e. dipoles, as an indicator. Here we realize an integrated displacement sensor based on the directional emission of Huygens dipoles excited in an individual dipolar antenna. The position of the antenna relative to the excitation field determines its directional coupling into a six-way crossing of photonic crystal waveguides. In our experimental study supported by theoretical calculations, we demonstrate the first prototype of an integrated displacement sensor with a standard deviation of the position accuracy below $λ$/300 at room temperature and ambient conditions.

机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。

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