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arXiv 1905.11207cs.ET
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一种新的通用紧凑模型方法,用于从器件角度及其他角度优化7nm工艺节点电路

A Novel General Compact Model Approach for 7nm Technology Node Circuit Optimization from Device Perspective and Beyond

Qiang Huo, Zhenhua Wu, Weixing Huang, Xingsheng Wang, Geyu Tang, Jiaxin Yao, Yongpan Liu, Feng Zhang, Ling Li, Ming Liu

摘要:

这项工作提出了一种新的通用紧凑型模型的7nm技术节点器件,如FinFET。作为对传统紧凑模型的扩展,该模型基于三维器件的一维Poisson方程和短沟道效应、量子效应等物理效应的解析方程,将少量TCAD校准的紧凑模型与统计方法相结合,消除了繁琐的物理推导。通用紧凑模型具有提取效率高、精度高、缩放能力强和传递能力好等优点。作为一个演示应用,FinFET的两个关键设计旋钮和它们的RC控制ESD功率钳位电路的多重影响进行了系统的评估与新提出的通用紧凑模型的实施,占器件设计,电路性能优化和变异控制。ESD电源箝位器的性能可以得到极大的改善。该框架也适用于5nm节点栅极全包围器件的寻路研究,如纳米线(NW)FET,纳米片(NSH)FET等。

英文摘要:

This work presents a novel general compact model for 7nm technology node devices like FinFETs. As an extension of previous conventional compact model that based on some less accurate elements including one-dimensional Poisson equation for three-dimensional devices and analytical equations for short channel effects, quantum effects and other physical effects, the general compact model combining few TCAD calibrated compact models with statistical methods can eliminate the tedious physical derivations. The general compact model has the advantages of efficient extraction, high accuracy, strong scaling capability and excellent transfer capability. As a demo application, two key design knobs of FinFET and their multiple impacts on RC control ESD power clamp circuit are systematically evaluated with implementation of the newly proposed general compact model, accounting for device design, circuit performance optimization and variation control. The performance of ESD power clamp can be improved extremely. This framework is also suitable for pathfinding researches on 5nm node gate-all-around devices, like nanowire (NW) FETs, nanosheet (NSH) FETs and beyond.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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