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arXiv 1811.05044cond-mat.mtrl-sci
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使用新型钼前驱体在100 mm蓝宝石衬底上生长高质量大晶粒MoS2薄膜

High-quality, large-grain MoS2 films grown on 100 mm sapphire substrates using a novel molybdenum precursor

Paul Quayle, Bin Zhang, Jacob Leach, Brian Bersch, Joshua Robinson, Shanee Pacley

摘要:

二维MoS 2是一种晶体半导体,具有许多技术的高潜力。近年来的研究试图利用单层MoS 2的直接带隙和高载流子迁移率特性用于功能应用。迄今为止,二硫化钼的生产仍停留在研究水平,通常使用低产量、昂贵的技术少量合成样品。为了实现可扩展的基于MoS 2的技术,必须提供大面积、高质量和可负担得起的MoS 2晶片。在这里,我们报告的二硫化钼薄膜生长在100毫米的蓝宝石晶片上的化学气相沉积工艺,利用硫化氢和钼前体混合物组成的Na 2 MoO 4和NaCl。这些膜的颗粒是刻面的、大面积的,边缘长度为1-75微米。生长条件确定,产生单层二硫化钼膜。拉曼光谱显示E2 g和A1 g峰分离为17.9-19.1 cm-1。光致发光光谱表明,退火后的薄膜生长抑制trion发射。X射线光电子能谱学的退火膜显示在增加的S:Mo浓度比从1.90:1.00到2.09:1.00。

英文摘要:

Two-dimensional MoS2 is a crystalline semiconductor with high potential for numerous technologies. Research in recent years has sought to exploit the direct band gap and high carrier mobility properties of monolayer MoS2 for functional applications. To date, the production of MoS2 has remained at the research level and samples are usually synthesized in small quantities using small yield, expensive techniques. In order to realize scalable MoS2-based technology, large-area, high-quality and affordable MoS2 wafers must become available. Here we report on MoS2 films grown on 100 mm sapphire wafers by a chemical vapor deposition process utilizing hydrogen sulfide and molybdenum precursor mixtures consisting of Na2MoO4 and NaCl. The grains of these films are faceted, large-area, on the order of 1-75 microns in length on edge. Growth conditions are identified that yield monolayer MoS2 films. Raman spectroscopy shows an E2g and A1g peak separation of 17.9-19.1 cm-1. Photoluminescence spectroscopy shows that annealing the films post-growth suppresses trion emission. X-ray photoelectron spectroscopy of the annealed films shows an in increase in the S:Mo concentration ratio from 1.90:1.00 to 2.09:1.00.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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