功能衬底上MoS₂的液相前驱体化学气相沉积的现象学生长模式
Phenomenological Growth Regimes in Liquid-Precursor CVD of MoS$_2$ on Functional Substrates
- Faculty of Physics and CENIDE, University of Duisburg-Essen（杜伊斯堡-埃森大学物理学院与CENIDE）
- Université Caen Normandie, CEA, ENSICAEN, CNRS, Normandie Univ, CIMAP UMR6252（卡昂诺曼底大学、CEA、ENSICAEN、CNRS、诺曼底大学、CIMAP UMR6252）
机构由 AI 辅助整理，请以论文原文为准。
AI总结：
该研究针对二维TMDCs在功能衬底集成受气相生长动力学限制的问题，采用液相前驱体CVD法，结合多种衬底揭示了MoS₂的衬底相关生长模式及结构光学性质调控机制。
AI中文摘要：
二维过渡金属二硫化物（TMDCs）在功能衬底上的集成仍受随机气相生长动力学的限制。本文表明，MoS₂的液相前驱体化学气相沉积（CVD）引入了与衬底影响的反应-扩散过程一致的生长条件。通过在多种晶体衬底（蓝宝石、SrTiO₃、金红石TiO₂、MgO和6H-SiC）上利用生长前旋涂的MoO₃中间体，我们发现前驱体润湿性、表面化学和推断的传质限制的衬底相关变化与不同的生长形态相关。这些衬底相关的生长模式可解释为：SrTiO₃上有效横向生长长度减小、TiO₂上可能的前驱体锚定、MgO上可能的化学表面重构，以及SiC上可能的台阶边缘生长。拉曼光谱和光致发光光谱揭示了与应变、电荷环境和介电屏蔽差异相关的衬底相关振动和光学响应变化。最终，本研究强调衬底相关的反应-扩散框架是调控大面积二维材料结构和光学性质的潜在有用途径。
英文摘要：
The integration of two-dimensional transition-metal dichalcogenides (TMDCs) onto functional substrates remains constrained by stochastic vapor-phase growth dynamics. Here, we show that liquid-phase precursor chemical vapor deposition (CVD) of MoS$_2$ introduces growth conditions that are consistent with a substrate-influenced reaction-diffusion process. By utilizing pre-growth spin-coated MoO$_3$ intermediates across a diverse crystalline library (sapphire, SrTiO$_3$, rutile TiO$_2$, MgO, and 6H-SiC), we find that substrate-dependent variations in precursor wetting, surface chemistry, and inferred mass-transport constraints correlate with distinct growth morphologies. These substrate-dependent growth regimes are interpreted in terms of reduced effective lateral growth length on SrTiO$_3$, possible precursor anchoring on TiO$_2$, likely chemical surface restructuring on MgO, and possible step-edge growth on SiC. Raman and photoluminescence spectroscopy reveal substrate-dependent variations in vibrational and optical response that correlate with differences in strain, charge environment, and dielectric screening. Ultimately, this work highlights a substrate-dependent reaction-diffusion framework as a potentially useful route for tuning the structural and optical properties of large-area 2D materials.
