以CO2为前驱体，通过热丝金属氧化物沉积法在r面蓝宝石上外延生长WO3
Epitaxial growth of WO3 on r-plane sapphire by hot-filament metal-oxide deposition using CO2 as a precursor
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中文总结 AI 辅助
研究以CO2为前驱体，用热丝金属氧化物沉积法在r面蓝宝石上外延生长WO3，获得0.25 nm/min低生长速率的薄膜，该薄膜可见光透明、3 eV以上波段高吸收
中文摘要 AI 辅助
本文展示了以CO2为前驱体，通过热丝金属氧化物沉积法制备WO3外延薄膜的过程，薄膜生长速率低至0.25 nm/min；采用可变角光谱椭偏仪评估薄膜光学性能，结果显示其在可见光波段透明，3 eV以上波段吸收性强
英文摘要
The deposition of epitaxial films of WO3 by hot-filament metal-oxide deposition using CO2 as a precursor was demonstrated. The films were obtained at a low growth rate of 0.25 nm/min. The optical properties of the film were assessed by variable-angle spectroscopic ellipsometry, indicating transparency across the visible spectrum and high absorption above 3 eV.
发表机构
- Uppsala University（乌普萨拉大学）
- Polestar Performance AB
机构由 AI 辅助整理，请以论文原文为准。
