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arXiv 1302.3177cond-mat.mtrl-sci
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大面积单晶(0001)取向MoS2薄膜

Large Area Single Crystal (0001) Oriented MoS2 Thin Films

Masihhur R. Laskar, Lu Ma, ShanthaKumar K, Pil Sung Park, Sriram Krishnamoorthy, Digbijoy N. Nath, Wu Lu, Yiying Wu, Siddharth Rajan

摘要:

层状金属二硫属化物材料是一类具有广泛能带隙和性质的半导体材料,具有开拓物理和技术应用新领域的潜力。然而,在大面积上获得高晶体质量的薄膜仍然是一个挑战。在这里,我们表明,化学气相沉积(CVD)可以用来实现大面积的电子级单晶二硫化钼(MoS2)薄膜具有最高的迁移率在CVD生长的薄膜迄今为止。发现生长温度和衬底的选择对薄膜的生长质量有重要影响,并且首次在(0001)取向的蓝宝石上的高温生长产生了高度取向的单晶MoS2薄膜。在最佳条件下生长的薄膜被发现是高结构质量的高分辨率X射线衍射,透射电子显微镜和拉曼测量,接近参考地质二硫化钼的质量。光致发光和电学测量证实了具有低背景载流子浓度和高迁移率的光学活性MoS2的生长。本文报道的用于生长高质量MoS2薄膜的CVD方法为各种层状2D硫族化物半导体及其异质结构的生长铺平了道路。

英文摘要:

Layered metal dichalcogenide materials are a family of semiconductors with a wide range of energy band gaps and properties, and potential to open up new areas of physics and technology applications. However, obtaining high crystal quality thin films over a large area remains a challenge. Here we show that chemical vapor deposition (CVD) can be used to achieve large area electronic grade single crystal Molybdenum Disulfide (MoS2) thin films with the highest mobility reported in CVD grown films so far. Growth temperature and choice of substrate were found to critically impact the quality of film grown, and high temperature growth on (0001) orientated sapphire yielded highly oriented single crystal MoS2 films for the first time. Films grown under optimal conditions were found to be of high structural quality from high-resolution X-ray diffraction, transmission electron microscopy, and Raman measurements, approaching the quality of reference geological MoS2. Photoluminescence and electrical measurements confirmed the growth of optically active MoS2 with a low background carrier concentration, and high mobility. The CVD method reported here for the growth of high quality MoS2 thin films paves the way towards growth of a variety of layered 2D chalcogenide semiconductors and their heterostructures.

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