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arXiv 1701.04124cond-mat.mtrl-sci
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铂族金属薄膜电阻率的厚度依赖性

Thickness dependence of the resistivity of Platinum group metal thin films

Shibesh Dutta, Kiroubanand Sankaran, Kristof Moors, Geoffrey Pourtois, Sven Van Elshocht, Jurgen Bommels, Wilfried Vandervorst, Zsolt Tokei, Christoph Adelmann

摘要:

本文报道了几种铂族金属(Ru,Pd,Ir,Pt)的薄膜电阻率。由于铂族薄膜的电阻率对厚度的依赖性较弱,因此对于低于约5 nm的膜厚度,铂族薄膜显示出与Cu相当或更低的电阻率。根据实验确定的晶界之间的平均线性距离以及电子平均自由程的从头计算,在半经典Mayadas-Shatzkes模型[Phys.Rev.B1,1382(1970)]内模拟Ru、Ir和Cu的数据,以评估表面和晶界散射对电阻率的综合贡献。对于Ru,建模结果表明,表面散射强烈依赖于周围的材料,在与SiO2或空气的界面处具有近镜面散射,但在与TaN的界面处具有漫散射。考虑到实验结果的薄膜电阻率的平均自由程内的Mayadas-Shatzkes模型的依赖关系也进行了讨论。

英文摘要:

We report on the thin film resistivity of several platinum-group metals (Ru, Pd, Ir, Pt). Platinum-group thin films show comparable or lower resistivities than Cu for film thicknesses below about 5\,nm due to a weaker thickness dependence of the resistivity. Based on experimentally determined mean linear distances between grain boundaries as well as ab initio calculations of the electron mean free path, the data for Ru, Ir, and Cu were modeled within the semiclassical Mayadas--Shatzkes model [Phys. Rev. B 1, 1382 (1970)] to assess the combined contributions of surface and grain boundary scattering to the resistivity. For Ru, the modeling results indicated that surface scattering was strongly dependent on the surrounding material with nearly specular scattering at interfaces with SiO2 or air but with diffuse scattering at interfaces with TaN. The dependence of the thin film resistivity on the mean free path is also discussed within the Mayadas--Shatzkes model in consideration of the experimental findings.

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