arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 1206.4587cond-mat.mes-hallcond-mat.mtrl-sci
收藏

石墨烯表面原子层沉积超薄氧化物薄膜

Ultrathin Oxide Films by Atomic Layer Deposition on Graphene

Luda Wang, Jonathan J. Travis, Andrew S. Cavanagh, Xinghui Liu, Steven P. Koenig, Pinshane Y. Huang, Steven M. George, J. Scott Bunch

摘要:

在本文中,提出了一种方法来创建和表征机械鲁棒的,独立的,可折叠的,氧化物薄膜与控制,纳米级的厚度使用原子层沉积(ALD)在石墨烯上。使用ALD将氧化铝膜沉积到悬浮的石墨烯膜上。随后对石墨烯的蚀刻只留下了几个原子厚度的纯氧化铝膜。使用加压起泡测试来确定这些抗静电膜具有154 \pm 13 GPa的杨氏模量。该杨氏模量与厚得多的氧化铝ALD膜相当。这种行为表明,这些二维薄膜具有优异的机械完整性。该膜也是标准气体不可渗透的,这表明它们是无针孔的。这些连续的薄膜有望在诸如薄膜涂层、膜和柔性电子器件等领域中实现新的应用。

英文摘要:

In this paper, a method is presented to create and characterize mechanically robust, free standing, ultrathin, oxide films with controlled, nanometer-scale thickness using Atomic Layer Deposition (ALD) on graphene. Aluminum oxide films were deposited onto suspended graphene membranes using ALD. Subsequent etching of the graphene left pure aluminum oxide films only a few atoms in thickness. A pressurized blister test was used to determine that these ultrathin films have a Young's modulus of 154 \pm 13 GPa. This Young's modulus is comparable to much thicker alumina ALD films. This behavior indicates that these ultrathin two-dimensional films have excellent mechanical integrity. The films are also impermeable to standard gases suggesting they are pinhole-free. These continuous ultrathin films are expected to enable new applications in fields such as thin film coatings, membranes and flexible electronics.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑