微悬臂梁的耗散与气压和金属涂层的关系
Dissipation of micro-cantilevers as a function of air pressure and metallic coating
摘要：
在这封信中，我们表征的内部耗散涂层微悬臂梁通过其机械热噪声。利用自制的干涉仪装置，我们在测量它们的偏转时获得了低至1 E-14 m/rtHz的分辨率。利用波动耗散定理和Kramers-Kronig关系，从测量的噪声谱中重建了完整的机械响应函数，并研究了随频率变化的耗散随气压和金属涂层性质的变化。利用不同厚度的金涂层，我们讨论了内部粘弹性阻尼的来源。
英文摘要：
In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 1E-14m/rtHz in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuilt the full mechanical response function from the measured noise spectrum, and investigate frequency dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we discuss the source of the internal viscoelastic damping.
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