从噪声测量看涂层微悬臂梁中粘性和粘弹性耗散的频率依赖性
Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement
摘要：
测量了软硅原子力显微镜杠杆的机械热噪声。使用干涉设置，我们有一个分辨率下降到1 E-14米/rtHz的宽光谱范围（3赫兹至1 E5赫兹）。低频特性显著取决于反射涂层的存在：未涂覆的反射镜的光谱几乎是平坦的，而涂覆的反射镜的光谱趋势类似于1/f。在力学系统的模型中增加粘弹性项可以解释这种观察结果。使用Kramers-Kronig关系验证这种方法与一个完整的确定的悬臂梁的响应：一个小系数的幂律被发现的频率依赖性的粘弹性由于涂层，而由于周围的大气中的粘性阻尼准确描述的Sader模型。
英文摘要：
We measure the mechanical thermal noise of soft silicon atomic force microscopy cantilevers. Using an interferometric setup, we have a resolution down to 1E-14 m/rtHz on a wide spectral range (3 Hz to 1E5 Hz). The low frequency behavior depends dramatically on the presence of a reflective coating: almost flat spectrums for uncoated cantilevers versus 1/f like trend for coated ones. The addition of a viscoelastic term in models of the mechanical system can account for this observation. Use of Kramers-Kronig relations validate this approach with a complete determination of the response of the cantilever: a power law with a small coefficient is found for the frequency dependence of viscoelasticity due to the coating, whereas the viscous damping due to the surrounding atmosphere is accurately described by the Sader model.
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