用于智能生物传感器的多畴锂酸盐微悬臂梁
Multidomain lithium niobate microcantilever for smart biosensor
摘要：
双晶型锂离子电池的制造涉及z切割晶片的微加工以产生多畴结构。腐蚀后，在畴间壁附近的位置制作双压电晶片铁电悬臂梁。利用铁电晶片之压电效应，利用射频电压激发悬臂振动，并利用光学侦测来撷取振动。两种不同硅烷的自组装层化学沉积在微悬臂梁上。通过两种方法独立地检测层，包括悬臂固有振动的低频偏移和来自硅烷层的拉曼谱线。可能的应用包括实时域中的智能生物传感器。
英文摘要：
Fabrication of the bimorph lithium niobate cantilevers involves a micro machining of a z-cut wafer to create a multidomain structure. After etching, the bimorph ferroelectric cantilevers are fabricated at the locations near interdomain walls. Cantilever vibrations are excited by rf voltage due to piezoelectric effect in a ferroelectric chip, and optical detection is employed to pickup the vibrations. The self-assembling layers of two different Silanes are chemically deposited on the micro cantilevers. The layers are detected independently by two methods including a low frequency shift of cantilever natural vibrations, and Raman spectral lines from the Silane layers. Possible applications include smart biosensors in a real time domain.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
