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arXiv 1002.2156cond-mat.mtrl-scicond-mat.mes-hall
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聚焦电子束诱导沉积钴的金属含量变化

Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

Laurent Bernau, Mihai Gabureac, Ivo Utke

摘要:

从羰基钴实验生产含钴沉积物,并测量其组成。发现钴浓度在20和70原子%之间容易地可调通过改变停留时间。金属浓度的变化被解释为存在于腔室背景压力中的碳氢化合物的共沉积。

英文摘要:

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced and their composition is measured. The Cobalt concentration is found to be readily tunable between 20 and 70 at.% by variation of the dwell time. The variations in metallic concentration are explained by co-deposition of hydrocarbons present in the chamber background pressure.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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