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arXiv 0908.0720cond-mat.mtrl-sci
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电极效应对多晶(Ba0.6Sr 0.4)(Zr0.3Ti 0.7)O3薄膜电性能的影响

Electrode effects on electrical properties of polycrystalline (Ba0.6Sr0.4)(Zr0.3Ti0.7)O3 thin films

Y. K. Vayunandana Reddy, Jerome Wolfman, Monique Gervais, Francois Gervais

摘要:

在镀有IrO 2和Pt的Si衬底上生长了(Ba 0.6Sr 0.4)(Zr 0.3Ti 0.7)O3薄膜。Pt电极上的膜在较低的频率下表现出较大的介电色散,另一方面IrO 2上的膜表现出几乎与频率无关的介电常数高达1 MHz。在1 MHz下,Pt和IrO 2上的可调谐性(损耗)分别为55%(0.159)和45%(0.07)。与Pt(345)上的膜相比,IrO 2(620)上的膜的FOM也高。与Pt(6.14x10-3 A/cm 2)涂覆的Si衬底相比,IrO 2(1.3 x 10-6 A/cm 2)上也获得了非常低的漏电流密度。

英文摘要:

(Ba0.6Sr0.4)(Zr0.3Ti0.7)O3 thin films were grown on IrO2 and Pt coated Si substrates. Film on Pt electrode showed large dielectric dispersion at lower frequency and on other hand film on IrO2 showed dielectric constant almost independent with frequency up to 1 MHz. Tunability (Loss) on Pt and IrO2 at 1 MHz were 55% (0.159) and 45% (0.07), respectively. The FOM is also high for film on IrO2 (620) compared on to the Pt (345). Very low leakage current density also obtained on IrO2 (1.3 x 10-6 A/cm2) compared to Pt (6.14x10-3 A/cm2) coated Si substrates.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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