arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 0905.1788cond-mat.mtrl-scicond-mat.mes-hall
收藏

LiNbO3薄膜及多孔硅基结构的动态湿敏特性

Dynamical Humidity Sensing Characterization of LiNbO3 Film and Porous Si based Structures

S. Bravina, N. Morozovsky, E. Dogheche, D. Remiens, R. Boukherroub

摘要:

研究了脉冲湿度变化对Pt/LiNbO_3-film/Pt:Ti/SiO_2/Si和多孔Si/Si结构的动态电流-电压环和电荷-电压环参数以及动态瞬态电流的影响。电流-电压回路和瞬态电流曲线的特性是在空间电荷区域中的极化过程的特征,类似于在离子半导体的情况下观察到的。证明了利用动态电物理特性方法研究快速湿度变化下各种材料特性的有效性。结果被认为是从高速湿度传感应用的角度来看。

英文摘要:

The results of the investigation of impact of pulse humidity changes on the parameters of dynamic current-voltage loops and charge-voltage loops, and also dynamic transient currents for Pt/LiNbO3-film/Pt:Ti/SiO2/Si and porous Si/Si structures are presented. The peculiarities of current-voltage loops and transient currents curves are characteristic for poling processes in the space charge region similar to that observed in the case of ionic semiconductors. The efficiency of using the methods of dynamic electrophysical characterization for studying characteristics of various under fast humidity changes was demonstrated. The results are considered from the standpoint of applications in high-speed humidity sensing.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑