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arXiv 0901.4158physics.optics
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高品质因数光子晶体纳米梁腔

High Quality factor photonic crystal nanobeam cavities

Parag B. Deotare, Murray W. McCutcheon, Ian W. Frank, Mughees Khan, Marko Loncar

摘要:

我们研究了硅基高品质因数光子晶体纳米梁腔的设计、制备和实验特性。采用五孔锥形一维光子晶体反射镜,通过精确控制腔长,设计出了理论品质因数高达1400万的腔。通过检测垂直入射激光束的交叉偏振共振散射光,我们测量了近750,000的品质因数。模拟了腔体尺寸对模式频率和品质因数的影响,并进行了实验验证。

英文摘要:

We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 14 million. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 750,000. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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