一种皮克级和纳米级光子晶体光机械腔
A picogram and nanometer scale photonic crystal opto-mechanical cavity
摘要：
我们描述的设计，制造和测量的腔光机械系统组成的两个纳米梁的氮化硅在彼此的近场，形成一个所谓的“拉链”腔。将光子晶体图案化应用于纳米梁，以将光学能和机械能局部化到相同的1/2微米尺度体积。结构的微克级质量，以及强大的每光子光学梯度力，导致巨大的光学弹簧效应。此外，一种新的阻尼制度的探索，其中小的热容量的拉链腔的结果在蓝失谐光机械阻尼。
英文摘要：
We describe the design, fabrication, and measurement of a cavity opto-mechanical system consisting of two nanobeams of silicon nitride in the near-field of each other, forming a so-called "zipper" cavity. A photonic crystal patterning is applied to the nanobeams to localize optical and mechanical energy to the same cubic-micron-scale volume. The picrogram-scale mass of the structure, along with the strong per-photon optical gradient force, results in a giant optical spring effect. In addition, a novel damping regime is explored in which the small heat capacity of the zipper cavity results in blue-detuned opto-mechanical damping.
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