One-dimensional nanobeam photonic crystal cavities are fabricated in an Er-doped amorphous silicon nitride layer. Photoluminescence from the cavities around 1.54 um is studied at cryogenic and room temperatures at different optical pump powers. The resonators demonstrate Purcell enhanced absorption and emission rates, also confirmed by time-resolved measurements. Resonances exhibit linewidth narrowing with pump power, signifying absorption bleaching and the onset of stimulated emission in the material at both 5.5 K and room temperature. We estimate from the cavity linewidths that Er has been pumped to transparency at the cavity resonance wavelength.
We present the design, fabrication and characterization of high quality factor silicon nitride nanobeam PhC cavities at visible wavelengths for coupling to diamond color centers in a cavity QED system. We demonstrate devices with a quality factor of about 24;000 around the zero-phonon line of the germanium-vacancy center in diamond. We also present an efficient fiber-to-waveguide coupling platform for suspended nanophotonics. By gently changing the corresponding effective indices at the fiber-waveguide interface, we achieve an efficiency of about 96% at the cavity resonance.
Engineering an array of precisely located cavity-coupled active media poses a major experimental challenge in the field of hybrid integrated photonics. We deterministically position solution processed colloidal quantum dots (QDs) on high quality-factor silicon nitride nanobeam cavities and demonstrate light-matter coupling. By lithographically defining a window on top of an encapsulated cavity that is cladded in a polymer resist, and spin coating QD solution, we can precisely control the placement of the QDs, which subsequently couple to the cavity. We show that the number of QDs coupled to th…
We resolve the thermal motion of a high-stress silicon nitride nanobeam at frequencies far below its fundamental flexural resonance (3.4 MHz) using cavity-enhanced optical interferometry. Over two decades, the displacement spectrum is well-modeled by that of a damped harmonic oscillator driven by a $1/f$ thermal force, suggesting that the loss angle of the beam material is frequency-independent. The inferred loss angle at 3.4 MHz, $ϕ= 4.5\cdot 10^{-6}$, agrees well with the quality factor ($Q$) of the fundamental beam mode ($ϕ= Q^{-1}$). In conjunction with $Q$ measurements made on higher orde…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle) quantum coherent operation at room temperature. String-like beam resonators possess conventionally 10 times smaller $Q\cdot f$ products; however, on account of their much larger $Q$-to-mass ratio and reduced mode density, they remain a canonical choice for precision force, mass, and charge sensing, and have recently enabled Heisenberg-limited position measu…
We experimentally show octave-spanning supercontinuum generation in a non-stoichiometric silicon-rich nitride waveguide when pumped by femtosecond pulses from an erbium fiber laser. The pulse energy and bandwidth are comparable to results achieved in stoichiometric silicon nitride waveguides, but our material platform is simpler to manufacture. We also observe wave-breaking supercontinuum generation by using orthogonal pumping in the same waveguide. Additional analysis reveals that the waveguide height is a powerful tuning parameter for generating mid-infrared dispersive waves while keeping th…
Nanoscale photonic crystal cavity optomechanical devices enable detection of nanomechanical phenomena with a sensitivity sufficient to observe quantum effects. Here we present the design of a one-dimensional air-mode photonic crystal cavity patterned in a silicon nitride nanobeam, and show that it forms the basis for cavity optomechanical split-beam and paddle nanocavity devices useful for force detection and nonlinear quantum sensing. The air-mode of this device is advantageous for optomechanical coupling, while also having ultrahigh optical quality factor $Q_o\sim 10^6$ despite its proximity…
Silicon nitride is awell-established material for photonic devices and integrated circuits. It displays a broad transparency window spanning from the visible to the mid-IR and waveguides can be manufactured with low losses. An absence of nonlinear multi-photon absorption in the erbium lightwave communications band has enabled various nonlinear optic applications in the past decade. Silicon nitride is a dielectric material whose optical and mechanical properties strongly depend on the deposition conditions. In particular, the optical bandgap can be modified with the gas flow ratio during low-pr…
Mid-infrared optical frequency combs are of significant interest for molecular spectroscopy due to the large absorption of molecular vibrational modes on one hand, and the ability to implement superior comb-based spectroscopic modalities with increased speed, sensitivity and precision on the other hand. Substantial advances in mid-infrared frequency comb generation have been made in recent years based on nonlinear frequency conversion, microresonator Kerr frequency combs, quantum cascade lasers and mode locking regimes. Here we demonstrate a simple, yet effective method for the direct generati…
We present a hybrid fiber/waveguide design for a 100-MHz frequency comb that is fully self-referenced and temperature controlled with less than 5 W of electrical power. Self-referencing is achieved by supercontinuum generation in a silicon nitride waveguide, which requires much lower pulse energies (~200 pJ) than with highly nonlinear fiber. These low-energy pulses are achieved with an erbium fiber oscillator/amplifier pumped by two 250-mW passively-cooled pump diodes that consume less than 5 W of electrical power. The temperature tuning of the oscillator, necessary to stabilize the repetition…
