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arXiv 0803.1068physics.opticsphysics.comp-ph
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一种用于电磁近场模拟的严格有限元区域分解法

A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations

L. Zschiedrich, S. Burger, A. Schädle, F. Schmidt

备注：
9 pages, 7 figures, SPIE conference Advanced Lithography / Optical Microlithography XXI (2008)
发表信息：
Proc. SPIE 6924 (2008) 692450, (Optical Microlithography XXI, H.J. Levinson, M.V. Dusa, Eds.)
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摘要：

对电磁场传播过程进行严格的计算机模拟已经成为光学计量和纳米结构光学元件设计的重要工具。矢量有限元法（FEM）是对复杂几何特征进行精确建模的良好选择。然而，从数值的角度来看，即使对于中等大小的3D域，求解线性方程组也是非常苛刻的。在数值计算中，区域分解方法是克服这个问题的常用策略。在这种方法中，整个计算域被分成更小的域，并且使用界面条件来确保电磁场的连续性。不幸的是，为静电问题开发的区域分解方法的标准实现不适合波传播问题。因此，在较早的论文中，我们提出了一个区域分解法适用于电磁场波传播问题。在本文中，我们将这种方法应用到三维掩模模拟。

英文摘要：

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial finite element method (FEM) is a good choice for an accurate modeling of complicated geometrical features. However, from a numerical point of view solving the arising system of linear equations is very demanding even for medium sized 3D domains. In numerics, a domain decomposition method is a commonly used strategy to overcome this problem. Within this approach the overall computational domain is split up into smaller domains and interface conditions are used to assure continuity of the electromagnetic field. Unfortunately, standard implementations of the domain decomposition method as developed for electrostatic problems are not appropriate for wave propagation problems. In an earlier paper we therefore proposed a domain decomposition method adapted to electromagnetic field wave propagation problems. In this paper we apply this method to 3D mask simulation.

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