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arXiv 2606.28056cond-mat.mes-hallphysics.atm-clus
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利用电子衍射确定扫描电子显微镜中电子束的横向相干性

Determining Electron Beam Lateral Coherence in a Scanning Electron Microscope Using Electron Diffraction

NWO-Institute AMOLF(荷兰皇家科学院AMOLF研究所);Laboratory of Nanoscience for Energy Technologies (LNET), STI, École Polytechnique Fédérale de Lausanne(洛桑联邦理工学院能源技术纳米科学实验室);Monash University(莫纳什大学);ICFO-Institut de Ciencies Fotoniques, The Barcelona Institute of Science and Technology(巴塞罗那科技研究所光子科学研究所);ICREA-Institució Catalana de Recerca i Estudis Avançats(加泰罗尼亚高级研究学院)

Evelijn Akerboom, Fatemeh Kiani, Giulia Tagliabue, Wiebke Albrecht, Joanne Etheridge, F. Javier García de Abajo, Albert Polman

AI总结:

在扫描电子显微镜中实现扫描透射电子显微镜功能,通过电子衍射测量电子束在样品平面的横向相干度,下限约为60%。

摘要:

我们在扫描电子显微镜(SEM)中开发并表征了扫描透射电子显微镜(STEM)能力,以研究样品平面上电子束(e-beam)的有效横向相干性。利用单晶金薄片和单层石墨烯样品,我们获得了高质量选区电子衍射(SAED)图和会聚束电子衍射(CBED)图案,验证了系统在30 keV加速电压下探测晶体学信息的能力。基于这些能力,我们实施了一种方法(该方法改编自传统透射电子显微镜中使用的技术)来测量SEM样品平面上电子束的横向相干度。通过分析波矢量差为0.031每埃的两个不同波矢量电子之间的干涉,我们提取了电子束直径5%范围内横向相干度的下限约为60%。这些相干值足以在SEM中实现量子相干的电子-光-物质相互作用实验。

英文摘要:

We develop and characterize scanning transmission electron microscopy (STEM) capabilities within a scanning electron microscope (SEM) to investigate the effective lateral coherence of the electron beam (e-beam) in the specimen plane. Using single-crystalline Au flakes and a sample composed of a monolayer of graphene, we obtain high-quality selected-area electron diffraction (SAED) maps and convergent-beam electron diffraction (CBED) patterns, validating the systems ability to probe crystallographic information at an acceleration voltage of 30 keV. Building on these capabilities, we implement a method, which is adapted from techniques traditionally used in transmission electron microscopy, to measure the degree of lateral coherence of the e-beam in the specimen plane of the SEM. By analyzing interference between electrons with two different wave vectors separated by 0.031 per angstrom, we extract a lower limit for the degree of lateral coherence over 5% of the e-beam diameter of approximately 60%. These coherence values are sufficient to enable quantum-coherent electron-light-matter interaction experiments in the SEM.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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