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arXiv 2602.18336cond-mat.mtrl-sci
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缺陷介导的多孔氮化镓分布式布拉格反射镜电化学蚀刻的随机模拟

A stochastic simulation of the dislocation-mediated etching of porous GaN distributed Bragg reflectors

Department of Materials Science, University of Cambridge(剑桥大学材料科学系)

Piotr Sokolinski, Ben Thornley, Zetai Xu, Thom R. Harris-Lee, Menno J. Kappers, Rachel A. Oliver

AI总结:

该研究通过随机模拟再现了多孔氮化镓分布式布拉格反射镜电化学蚀刻过程中的级联结构特征,并展示了模拟结果与实验数据的一致性。

摘要:

分布式布拉格反射镜(DBR)可以通过电化学蚀刻氮化物单晶结构来制备,该结构由交替的高n型掺杂和非故意掺杂(NID)氮化镓层组成。穿丝缺陷(TDs)可以电化学蚀刻成传输管道,这些管道可以将蚀刻剂输送到NID层以接触掺杂材料。实验表明,这一过程可能通过一条TD进入掺杂层,然后横向传播通过掺杂层以继续通过另一条TD。在多层中,这一过程会形成复杂的孔结构,已被描述为'级联'。在此,我们构建了一个随机模拟来模拟DBR蚀刻过程,能够重现观察到的微结构的一些关键特征,包括级联形态。通过将模拟输出与在不同电压下蚀刻的样品进行比较,我们展示了通过在模拟中改变掺杂层蚀刻的概率,可以重现实验中施加偏压时的 chronoamperometry 数据变化。模拟的结果复制了实验观察到的级联形态。在更高电压下,实验数据揭示了级联特征比例较低的趋势,这一趋势也通过相关概率值的模拟得到复制。模拟的结果还与实验 chronoamperometry 数据很好地相关,对于那些-与DBR不同-掺杂层厚度在单晶多层中变化的样品,这表明概率模拟可以应用于各种结构,以帮助理解由缺陷介导的电化学蚀刻过程。

英文摘要:

Distributed Bragg reflectors (DBRs) can be fabricated by electrochemically etching nitride epitaxial structures consisting of alternating layers of highly n-type doped and non-intentionally doped (NID) GaN. Threading dislocations (TDs) can be electrochemically etched into transport pipelines that can carry the etchant through the NID layers to access the doped material. Experimentally this has been shown to involve a mechanism where the etching pathway may follow one TD into a doped layer and then propagate sideways through the doped layer to continue via a different TD. Across multiple layers this process creates complex pore structures that have been described as 'cascades'. Here, we build a stochastic simulation for the DBR etching process that can reproduce some key features of the observed microstructures including the cascade morphology. By comparing the simulation output to samples etched at a range of voltages, we show that we can reproduce variations in experimental chronoamperometry data with applied bias by varying the probability of etching the doped layers within the simulation. The outputs of the resulting simulations replicate the experimentally observed cascade morphology. At higher voltages, experimental data reveal a lower proportion of cascade features, a trend that is also replicated by the simulations for relevant probability values. Outputs of the simulations also correlate well with experimental chronoamperometry data for samples where - unlike in a DBR - the thicknesses of the doped layers vary through the epitaxial multilayer, suggesting that the probabilistic simulation can be applied to a range of structures to help understand the dislocation-mediated electrochemical etching process.

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