arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2502.10941physics.optics
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通过晶圆级制造实现微波速率的紧凑型即插即用孤子微梳

Compact Turnkey Soliton Microcombs at Microwave Rates via Wafer-Scale Fabrication

Yuanlei Wang, Ze Wang, Chenghao Lao, Tianyu Xu, Yinke Cheng, Zhenyu Xie, Junqi Wang, Haoyang Luo, Xin Zhou, Bo Ni, Kaixuan Zhu, Yanwu Liu, Xing Jin, Min Wang, J… 展开作者

Yuanlei Wang, Ze Wang, Chenghao Lao, Tianyu Xu, Yinke Cheng, Zhenyu Xie, Junqi Wang, Haoyang Luo, Xin Zhou, Bo Ni, Kaixuan Zhu, Yanwu Liu, Xing Jin, Min Wang, Jian-Fei Liu, Xuening Cao, Ting Wang, Qihuang Gong, Bei-Bei Li, Fangxing Zhang, Yun-Feng Xiao, Qi-Fan Yang

AI总结:

本研究针对低重复率孤子微梳集成难题,通过晶圆级制造在4英寸晶圆上制备紧凑型氮化硅微谐振器,实现微波速率孤子微梳,为光子集成应用提供解决方案。

摘要:

非线性微谐振器中产生的孤子微梳促进了定时、频率合成和天文校准功能的光子集成。对于这些应用,低重复率孤子微梳至关重要,因为它们建立了光信号与微波信号之间的相干链路。然而,所需泵浦功率通常与重复率成反比,器件尺寸与重复率平方成反比,这使得低重复率孤子微梳难以集成到光子电路中。本研究在4英寸晶圆上设计并制造了具有高度紧凑型的氮化硅微谐振器。谐振器几何结构从环形设计为指形和螺旋形,以提高集成密度,同时获得超过10^7的品质因数。通过集成激光器直接驱动,实现了重复率低于10 GHz的即插即用孤子微梳。对于10 GHz载波频率,合成微波信号的相位噪声性能在100 kHz偏移频率下达到-130 dBc/Hz。这项工作为基于芯片的微波光子学和光谱学应用实现了孤子微梳的高密度集成。

英文摘要:

Soliton microcombs generated in nonlinear microresonators facilitate the photonic integration of timing, frequency synthesis, and astronomical calibration functionalities. For these applications, low-repetition-rate soliton microcombs are essential as they establish a coherent link between optical and microwave signals. However, the required pump power typically scales with the inverse of the repetition rate, and the device footprint scales with the inverse of square of the repetition rate, rendering low-repetition-rate soliton microcombs challenging to integrate within photonic circuits. This study designs and fabricates silicon nitride microresonators on 4-inch wafers with highly compact form factors. The resonator geometries are engineered from ring to finger and spiral shapes to enhance integration density while attaining quality factors over 10^7. Driven directly by an integrated laser, soliton microcombs with repetition rates below 10 GHz are demonstrated via turnkey initiation. The phase noise performance of the synthesized microwave signals reaches -130 dBc/Hz at 100 kHz offset frequency for 10 GHz carrier frequencies. This work enables the high-density integration of soliton microcombs for chip-based microwave photonics and spectroscopy applications.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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