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arXiv 2409.07971physics.ins-det
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用于微热量计应用的高纯度电镀金粒子吸收体的先进制备工艺

Advanced fabrication process for particle absorbers of highly pure electroplated gold for microcalorimeter applications

Michael Müller, Ria-Helen Zühlke, Sebastian Kempf

AI总结:

针对磁性微热量计的粒子吸收体制备需求,提出由两个独立电镀高纯度Au层构成的自支撑吸收体微制备工艺,通过优化参数实现高纯度(残余电阻率比超40),可嵌入放射源或制备可变性能阵列,提升探测器性能。

摘要:

磁性微热量计(MMCs)已成为需要出色能量分辨率、快速信号上升时间和优异线性度应用的关键技术。MMCs通过使用与吸收体热耦合的顺磁温度传感器,测量单个粒子在粒子吸收体内吸收时的温度升高。粒子吸收体的设计和制备是实现优异探测器性能的关键。本文提出一种由两个堆叠且独立电镀的高纯度Au层构成的自支撑粒子吸收体的微制备工艺。例如,这可实现在吸收体内嵌入放射源,从而在放射性核素计量中实现4π探测几何结构,或制备具有可变量子效率和能量分辨率的探测器阵列,以满足未来高能物理应用的需求。由于对光刻胶处理和电镀参数的精心优化,Au膜具有极高纯度和超过40的极高残余电阻率比值,可实现快速的内部吸收体热平衡。

英文摘要:

Magnetic microcalorimeters (MMCs) have become a key technology for applications requiring outstanding energy resolution, fast signal rise time and excellent linearity. MMCs measure the temperature rise upon absorption of a single particle within a particle absorber by using a paramagnetic temperature sensor that is thermally coupled to the absorber. The design and fabrication of the particle absorber is key for excellent detector performance. Here, we present a microfabrication process for free-standing particle absorbers made of two stacked and independently electroplated high-purity Au layers. This enables, for example, embedding of radioactive sources within the absorber for realizing a $4π$ detection geometry in radionuclide metrology or preparing detector arrays with variable quantum efficiency and energy resolution as requested for future applications in high energy physics. Due to careful optimization of photoresist processing and electroplating parameters, the Au films are of very high purity and very high residual resistivity ratio values above 40, allowing for fast internal absorber thermalization.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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