用于康普顿散射和能散衍射成像的过渡边缘传感器X射线线阵微量热计的研制
Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging
摘要：
我们提出了一个带过渡边缘传感器微量热线性阵列探测器开发的能量色散X射线衍射成像和康普顿散射的应用。原型探测器是一个阵列的20个过渡边缘传感器与吸收器在带状几何形状安排在一个线性阵列。我们讨论了开发这种阵列所需的制造步骤，包括Mo/Cu双层，Au电镀和SiNx膜的长条的原理证明制造。我们证明了带的几何形状对X射线脉冲响应的最小不必要的影响，并显示1/脉冲高度和脉冲衰减时间与吸收体长度的线性关系。对于研究的吸收体长度，初步测量显示能量分辨率为40 eV至180 eV附近的17千电子伏。此外，我们表明，到冷浴的热流几乎是独立的吸收器面积，并取决于SiNx膜的几何形状。
英文摘要：
We present a strip transition-edge sensor microcalorimeter linear array detector developed for energy dispersive X-ray diffraction imaging and Compton scattering applications. The prototype detector is an array of 20 transition-edge-sensors with absorbers in strip geometry arranged in a linear array. We discuss the fabrication steps needed to develop this array including Mo/Cu bilayer, Au electroplating, and proof-of-principle fabrication of long strips of SiNx membranes. We demonstrate minimal unwanted effect of strip geometry on X-ray pulse response, and show linear relationship of 1/pulse height and pulse decay times with absorber length. For the absorber lengths studied, preliminary measurements show energy resolutions of 40 eV to 180 eV near 17 keV. Furthermore, we show that the heat flow to the cold bath is nearly independent of the absorber area and depends on the SiNx membrane geometry.
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