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arXiv 2406.02008physics.app-ph
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具有超高电流和载流子密度的高性能铁电场效应晶体管

High-Performance Ferroelectric Field-Effect Transistors with Ultra-High Current and Carrier Densities

Seunguk Song, Kwan-Ho Kim, Rachael Keneipp, Nicholas Trainor, Chen Chen, Jeffrey Zheng, Joan M. Redwing, Marija Drndić, Roy H. Olsson, Deep Jariwala

AI总结:

本文通过采用2D MoS2通道和铁电AlScN栅介质,并用In替代Ti接触电极,显著提升了FeFET性能,实现了五倍增长的开态电流和开关比,并观察到单层MoS2的金属-绝缘体相变及低温高场效应迁移率。

摘要:

具有二维(2D)半导体通道的铁电场效应晶体管(FeFET)是下一代存内计算中极具前景的低功耗、嵌入式非易失性存储器(NVM)候选器件。然而,FeFET的性能会受到铁电层与通道之间电荷不平衡的限制,且对于低维半导体,还会受到金属电极与通道之间高接触电阻的限制。在此,我们报道了采用2D MoS2通道和铁电Al0.68Sc0.32N(AlScN)栅介质的接触工程FeFET的性能显著提升。将Ti替换为In接触电极,使FeFET的开态电流(1 V下约120 uA/um)和开关比(约2*10^7)提高了五倍。此外,MoS2通道在开态期间的高载流子浓度(> 10^14 cm^-2)促进了对单层MoS2中金属-绝缘体相变的观察,从而得以在低温下观察到高场效应迁移率(> 100 cm^2V^-1s^-1)。我们的工作和器件拓宽了FeFET的潜力,并为在2D通道中实现高载流子密度输运提供了独特平台。

英文摘要:

Ferroelectric field-effect transistors (FeFET) with two-dimensional (2D) semiconductor channels are promising low-power, embedded non-volatile memory (NVM) candidates for next-generation in-memory computing. However, the performance of FeFETs can be limited by a charge imbalance between the ferroelectric layer and the channel, and for low-dimensional semiconductors, also by a high contact resistance between the metal electrodes and the channel. Here, we report a significant enhancement in performance of contact-engineered FeFETs with a 2D MoS2 channel and a ferroelectric Al0.68Sc0.32N (AlScN) gate dielectric. Replacing Ti with In contact electrodes results in a fivefold increase in on-state current (~120 uA/um at 1 V) and on-to-off ratio (~2*10^7) in the FeFETs. In addition, the high carrier concentration in the MoS2 channel during the on-state (> 10^14 cm^-2) facilitates the observation of a metal-to-insulator phase transition in monolayer MoS2 permitting observation of high field effect mobility (> 100 cm^2V^-1s^-1) at cryogenic temperatures. Our work and devices broaden the potential of FeFETs and provides a unique platform to implement high-carrier-density transport in a 2D channel.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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