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arXiv 2402.15249physics.opticsphysics.app-ph
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VIS和IR波长下折射率的干涉微尺度测量

Interferometric microscale measurement of refractive index at VIS and IR wavelengths

Meguya Ryu, Simonas Varapnickas, Darius Gailevicius, Domas Paipulas, Eulalia Puig Vilardell, Zahra Khajehsaeidimahabadi, Saulius Juodkazis, Junko Morikawa, Mangirdas Malinauskas

AI总结:

本文利用透反射光谱与SEM测量煅烧光刻胶SZ2080微盘的干涉条纹,在可见光与红外波段测得其折射率约为2.2,并讨论了微光学结构表征中的不确定性。

摘要:

使用透射和反射光谱法对煅烧(空气中$1100^\circ$C)的光刻胶SZ2080$^\mathrm{TM}$微盘进行了折射率测定。通过选择特定波数/波长的干涉条纹来确定光学厚度,进而结合扫描电子显微镜(SEM)测量的微盘厚度确定折射率。在可见光和红外(2.5-13~$\mu$m)光谱范围内,测定了厚度为$\sim 6\pm 1~\mu$m的微盘折射率,在可见光和红外波长处为$2.2\pm 0.2$。结合几何参数、形状和质量密度重分布定义中可能存在的不确定性,讨论了微光学结构光学表征的特性。

英文摘要:

Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~μ$m thickness were determined at visible and IR (2.5-13~$μ$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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