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arXiv 2512.09255physics.opticscond-mat.mtrl-sciphysics.app-ph

可扩展的范德瓦耳斯光子学:高折射率的氧化镓薄膜具有单晶光学特性

Scalable van der Waals Photonics: High-Refractive-Index Gallium Sulfide Films with Single-Crystal Optical Properties

Emerging Technologies Research Center, XPANCEO(XPANCEO 新兴技术中心);Moscow Center for Advanced Studies(莫斯科高级研究中心)
Aleksandr Slavich, Georgy Ermolaev, Dmitriy Grudinin, Mikhail Tatmyshevskiy, Alexander Syuy, Nikolay Pak, Dmitry Yakubovsky, Mikhail Mironov, Adilet Toksumakov,… 展开作者

Aleksandr Slavich, Georgy Ermolaev, Dmitriy Grudinin, Mikhail Tatmyshevskiy, Alexander Syuy, Nikolay Pak, Dmitry Yakubovsky, Mikhail Mironov, Adilet Toksumakov, Alexander Melentev, Elena Zhukova, Anton Minnekhanov, Gleb Tselikov, Ivan Kruglov, Sergey M. Novikov, Andrey Vyshnevyy, Aleksey Arsenin, Valentyn Volkov

AI总结:

本文提出通过原子层沉积制备高折射率氧化镓薄膜,实现可扩展的范德瓦耳斯光子学平台,其光学性能接近单晶材料,适用于高集成度波导应用。

摘要:

将高折射率介电体整合到可扩展的光子架构中是推动集成电路和增强现实(AR)显示器发展的基础。范德瓦耳斯(vdW)材料具有优异的光学性能,包括高折射率和巨量各向异性,但其实施受到机械剥离片小面积和厚度不可控的限制。在这里,我们证明了通过原子层沉积(ALD)生长的氧化镓(GaS)克服了高光学性能与可制造性的权衡,成为大规模vdW介电平台。通过严格地将光学和结构基准测试与原始单晶进行比较,我们确定ALD-GaS的光学常数(n,k)几乎无法与单晶对应物区分。通过利用保留的平面各向异性,我们证明ALD-GaS在高度集成的波导中比传统可扩展高指数平台能更有效地抑制串扰。我们的发现确立了ALD-GaS作为在可见光谱光子学中实现各向异性vdW材料的技术可行路径。

英文摘要:

The integration of high-refractive-index dielectrics into scalable photonic architectures is foundational to advancing integrated circuits and augmented reality (AR) displays. Van der Waals (vdW) materials offer exceptional optical properties, including high refractive indices and giant anisotropy, but their implementation is constrained by the small area and uncontrolled thickness of mechanically exfoliated flakes. Here, we demonstrate that atomic layer deposition (ALD) grown gallium sulfide (GaS) overcomes the trade-off between high optical performance and manufacturability, emerging as a large-scale vdW dielectric platform. Through rigorous optical and structural benchmarking against pristine single crystals, we establish that the optical constants (n, k) of ALD-GaS are virtually indistinguishable from single-crystal counterparts. By leveraging the retained out-of-plane anisotropy, we demonstrate that ALD-GaS enables superior suppression of crosstalk in densely integrated waveguides compared to conventional scalable high-index platforms. Our findings establish ALD-GaS as a technologically viable pathway for implementing anisotropic vdW materials in visible-spectrum photonics.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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