arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2301.03754cond-mat.mtrl-sci
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惰性气体作为半导体中的电子杂质:硅中主动红外吸收的案例

Inert gas as electronic impurity in semiconductors: The case for active infrared absorption in silicon

Nian-Ke Chen, Yu-Chen Gao, Ji-Hong Zhao, Chun-Hao Li, Qi-Dai Chen, Hong-Bo Sun, Shengbai Zhang, Xian-Bin Li

AI总结:

本研究发现激光脉冲照射的硅中可长期保留高剂量氩,并揭示氩锁定空位缺陷通过空间排斥和振动调制缺陷态产生强红外吸收,为硅基非异质外延光子探测器提供主动红外吸收源。

摘要:

惰性(稀有气体)元素对周围化学环境极不活泼,常被用作各种半导体制造工艺中的保护气体。本工作意外发现,在激光脉冲照射的硅中,即使经过1300天,仍可测得高达$10^{17}-10^{20} cm^{-3}$的高剂量氩。第一性原理计算和分子动力学确定了一种独特的氩锁定空位(ALV)缺陷原子模型。与频繁迁移的纯硅空位相比,ALV缺陷在动力学上是稳健的。虽然氩在化学上是惰性的,但它通过空间排斥和振动运动很容易调制被占据空位的缺陷态,导致带隙内显著的能带分裂,从而产生强红外吸收。此外,替位氩与悬挂键之间的排斥产生浅施主,这解释了实验中增强的n型载流子的困惑。该工作为利用稀有气体元素在红外通信波长下直接在硅晶圆上为非异质外延光子探测器制造主动红外吸收源铺平了道路。

英文摘要:

Inert (noble gas) elements are extremely inactive to surrounding chemical environment and are frequently employed as protective gas in various semiconductor fabrication processes. In this work, we surprisingly discover that high doses of argon up to $10^{17}-10^{20} cm^{-3}$ can be measured in silicon exposed by laser pulses even after 1300 days. First-principles calculations and molecular dynamics identify a unique argon-locking-vacancy (ALV) defect atomic model in silicon. The ALV defect is dynamically robust in contrast to the frequently moving pure Si vacancy. While argon is chemically inert, it readily modulates defect states of the occupied vacancy via steric repulsion and rattling motions, leading to significant band splitting within bandgap and thus strong infrared absorptions. Moreover, the repulsion between substitutional argon and dangling bonds results in shallow donors which explains the confusion of enhanced n-type carriers in experiments. The work paves a way of using noble gas element to produce active infrared absorption source for the non-heteroepitaxy photonic detectors directly on silicon wafer at infrared communication wavelength.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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