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arXiv 2201.03725physics.opticsphysics.app-ph
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TM偏振超材料窄带红外滤光片的设计、制备及光谱特性

Design, fabrication, and spectral characterization of TM-polarized metamaterials-based narrowband infrared filter

Golsa Mirbagheri, David T. Crouse

摘要:

双曲超材料作为一种非磁性各向异性人工结构,在一个方向上表现出金属特性,在正交方向上表现出介电特性。本项目提出的双曲型超材料滤波器设计为金属丝网垂直于介质材料的交替层,保持TM中心波长不变,对于不同角度的入射光在M波段。这种纳米结构的几何尺寸小于工作波长,并且由于双曲色散而支持大的波矢量。与传统的布拉格叠层相比,铜法克尔床使滤波器的传输特性相同。为此目的,需要最先进的制造方法来在非晶硅和二氧化硅的交替层中制造这种小尺寸。在这项工作中,首先,我们演示了模拟布拉格堆栈与RCWA和有限元方法。然后,我们专注于我们的第一次多步光刻方法用于制造过滤器。最后,我们利用傅里叶变换红外光谱实验验证所制作的滤光片的光学特性。实验和光谱数据表明,双曲超材料滤波器的传输特性保持相同的倾斜TM偏振入射光。

英文摘要:

Hyperbolic Metamaterials, as a non-magnetic anisotropic artificial structure, show metal properties in one direction and dielectric behavior in orthogonal directions. The proposed hyperbolic metamaterial filter in this project is designed with the metal wire mesh perpendicular to the alternative layers of dielectric materials, keeps TM center wavelength unchanged for the different angle of incident light in MDIR regime. The geometric size of this nanostructure is smaller than the working wavelength and supports big wavevectors due to hyperbolic dispersion. In contrast with conventional Bragg stack, the copper fakir bed makes the transmission properties of the filter the same. For this purpose, the state-of-the-art fabrication methods are required to make such small dimensions in alternative layers of amorphous silicon and silicon dioxide. In this work, first we demonstrate the simulation of Bragg stack with RCWA and finite element methods. Then we focus on our first-time multistep lithography method used to fabricate the filter. Finally, we experimentally verify the optical characteristic of the fabricated filter using Fourier-transform infrared spectroscopy. The experimental and spectrometry data shows that transmission properties of the hyperbolic metamaterial filter remain the same for oblique TM polarized incident light.

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