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arXiv 2103.14812cond-mat.mtrl-sci
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高k介质层对石墨烯场效应晶体管1/f噪声特性的影响

Effect of High-k Dielectric Layer on 1/f Noise Behavior in Graphene Field-Effect Transistors

Yifei Wang, Vinh X. Ho, Zachary. N. Henschel, Michael P. Cooney, Nguyen Q. Vinh

摘要:

我们报告的1/f噪声特性,在低频率的石墨烯场效应晶体管,利用高k电介质氧化钽封装层(几纳米厚)放置在Si 3 N4原子层沉积。在f = 10 Hz时,获得了~ 2.2 x 10^(-10)Hz-1的低噪声水平。噪声的起源和物理机制可以通过McWhorter上下文来解释,其中载波数的波动对低频噪声起主导作用。优化制造工艺减少了石墨烯场效应晶体管中带电杂质的数量。该研究为降低石墨烯基器件中的噪声提供了对低频噪声的潜在物理机制的见解。

英文摘要:

We report the 1/f noise characteristics at low-frequency in graphene field-effect transistors that utilized a high-k dielectric tantalum oxide encapsulated layer (a few nanometers thick) placed by atomic layer deposition on Si3N4. A low-noise level of ~ 2.2 x 10^(-10) Hz-1 has been obtained at f = 10 Hz. The origin and physical mechanism of the noise can be interpreted by the McWhorter context, where fluctuations in the carrier number contribute dominantly to the low-frequency noise. Optimizing fabrication processes reduced the number of charged impurities in the graphene field-effect transistors. The study has provided insights into the underlying physical mechanisms of the noise at low-frequency for reducing the noise in graphene-based devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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