Engineering tunable strain fields in suspended graphene by microelectromechanical systems
Jens Sonntag, Matthias Goldsche, Tymofiy Khodkov, Gerard Verbiest, Sven Reichardt, Nils von den Driesch, Dan Buca, Christoph Stampfer
备注：
5 pages, 6 figures, conference proceeding
发表信息：
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), pp. 266-269 (2019)
Here, we present a micro-electromechanical system (MEMS) for the investigation of the electromechanical coupling in graphene and potentially related 2D materials. Key innovations of our technique include: (1) the integration of graphene into silicon-MEMS technology; (2) full control over induced strain fields and doping levels within the graphene membrane and their characterization via spatially resolved confocal Raman spectroscopy; and (3) the ability to detect the mechanical coupling of the graphene sheet to the MEMS device with via their mechanical resonator eigenfrequencies.
We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, that is used to tune the tension in the silicon beam, and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (~ 1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (-10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to eithe…
We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm-thick, high stress commercial film using electron beam lithography. A Fano resonance is observed in the transmission spectrum of TM polarized light impinging on the membrane at normal incidence, leading to an increase in its reflectivity from 10% to 78% at 937 nm. The observed spectrum is compared to the results of rigorous coupled wave analysis simulations based on measurements of the grating transver…
We report a tunable magnetoresistance (MR) behavior in suspended graphitic multilayers through point defect engineering by ion implantation. We find that ion implantation drastically changes the MR behavior: the linear positive MR in pure graphitic multilayers transforms into a negative MR after introducing significant short-range disorders (implanted boron or carbon atoms), consistent with recent non-Markovian transport theory. Our experiments suggest the important role of the non-Markovian process in the intriguing MR behavior for graphitic systems, and open a new window for understanding tr…
The strong excitonic effect in monolayer transition metal dichalcogenide (TMD) semiconductors has enabled many fascinating light-matter interaction phenomena. Examples include strongly coupled exciton-polaritons and nearly perfect atomic monolayer mirrors. The strong light-matter interaction also opens the door for dynamical control of mechanical motion through the exciton resonance of monolayer TMDs. Here we report the observation of exciton-optomechanical coupling in a suspended monolayer MoSe2 mechanical resonator. By moderate optical pumping near the MoSe2 exciton resonance, we have observ…
Suspended graphene is difficult to image by scanning probe microscopy due to the inherent van-der-Waals and dielectric forces exerted by the tip which are not counteracted by a substrate. Here, we report scanning tunneling microscopy data of suspended monolayer graphene in constant-current mode revealing a surprising honeycomb structure with amplitude of 50$-$200 pm and lattice constant of 10-40 nm. The apparent lattice constant is reduced by increasing the tunneling current $I$, but does not depend systematically on tunneling voltage $V$ or scan speed $v_{\rm scan}$. The honeycomb lattice of …
Coupling mechanical degrees of freedom with plasmonic resonances has potential applications in optomechanics, sensing, and active plasmonics. Here we demonstrate a suspended two-wire plasmonic nano-antenna acting like a nano-electrometer. The antenna wires are supported and electrically connected via thin leads without disturbing the antenna resonance. As a voltage is applied, equal charges are induced on both antenna wires. The resulting equilibrium between the repulsive Coulomb force and the restoring elastic bending force enables us to precisely control the gap size. As a result the resonan…
We consider a semiconducting carbon nanotube (CNT) laying on a ferromagnetic insulating sub-strate with one end depassing the substrate and suspended over a metallic gate. We assume that the polarised substrate induces an exchange interaction acting as a local magnetic field for the electrons in the non-suspended CNT side. Generalizing the approach of I. Snyman and Yu.V. Nazarov [Phys. Rev. Lett. 108, 076805 (2012)] we show that one can generate electrostatically a tun-able spin-polarized polaronic state localized at the bending end of the CNT. We argue that at low temperatures manipulation an…
Using optical diffraction, we study the mechanical vibrations of an array of micromechanical resonators. Implementing tunable electrostatic coupling between the suspended, doubly-clamped Au beams leads to the formation of a band of collective vibrational modes within these devices. The evolution of these modes with coupling strength is clearly manifested in the optical diffraction pattern of light transmitted through the array. The experimental results are analyzed using a simple model for one-dimensional phonons. These structures offer unique prospects for spectral analysis of complex mechani…
We propose a realization of mechanically tunable Ruderman-Kittel-Kasuya-Yosida interaction in a double quantum dot nanoelectromechanical device. The coupling between spins of two quantum dots suspended above a metallic plate is mediated by conduction electrons. We show that the spin-mechanical interaction can be driven by a slow modulation of charge density in the metallic plate. We propose to use Stuckelberg oscillations as a sensitive tool for detection of the spin and charge states of the coupled quantum dots. Theory of mechanical back action induced by a dynamical spin-spin interaction is …
Suspended nanowires are shown to provide mechanically-controlled coherent mixing/splitting of the spin states of transmitted electrons, caused by the Rashba spin-orbit interaction. The sensitivity of the latter to mechanical bending makes the wire a tunable nano-electro-mechanical (NEM) weak link between reservoirs. When the reservoirs are populated with misbalanced "spin up/down" electrons, the wire becomes a source of split spin currents, which are not associated with electric charge transfer and which do not depend on temperature or driving voltages. The mechanical vibrations of the bended …
The tuning of electrical circuit resonance with a variable capacitor, or varactor, finds wide application with the most important being wireless telecommunication. We demonstrate an electromechanical graphene varactor, a variable capacitor wherein the capacitance is tuned by voltage controlled deflection of a dense array of suspended graphene membranes. The low flexural rigidity of graphene monolayers is exploited to achieve low actuation voltage in an ultra-thin structure. Large arrays comprising thousands of suspensions were fabricated to give a tunable capacitance of over 10 pF/mm$^2$, high…
High quality factor mechanical resonators have shown great promise in developing classical or quantum technologies. Simultaneously, progress has been made in developing controlled mechanical nonlinearity. Here we combine these two directions of progress in a single platform consisting of coupled Silicon Nitride (SiNx) and graphene mechanical resonators. We show that nonlinear response can be induced on a large area SiNx resonator mode and can be efficiently controlled by coupling it to a gate-tunable, freely suspended graphene mode. The induced nonlinear response of the hybrid modes, as measur…
Double-gated graphene devices provide an important platform for understanding electrical and optical properties of graphene. Here we present transport measurements of single layer, bilayer and trilayer graphene devices with suspended top gates. In zero magnetic fields, we observe formation of pnp junctions with tunable polarity and charge densities, as well as a tunable band gap in bilayer graphene and a tunable band overlap in trilayer graphene. In high magnetic fields, the devices' conductance are quantized at integer and fractional values of conductance quantum, and the data are in good agr…
The non-linear interaction between two mechanical resonances of the same freely suspended carbon nanotube resonator is studied. We find that in the Coulomb blockade regime, the non-linear modal interaction is dominated by single-electron-tunneling processes, and that the mode-coupling parameter can be tuned with the gate voltage, allowing both mode softening and mode stiffening behavior. This is in striking contrast to tension-induced mode coupling in strings, where the coupling parameter is positive and gives rise to a stiffening of the mode. The strength of the mode coupling in carbon nanotu…
We propose a framework for inducing strong optomechanical effects in a suspended carbon nanotube based on deformation potential exciton-phonon coupling. The excitons are confined using an inhomogeneous axial electric field which generates optically active quantum dots with a level spacing in the milli-electronvolt range and a characteristic size in the 10-nanometer range. A transverse field induces a tunable parametric coupling between the quantum dot and the flexural modes of the nanotube mediated by electron-phonon interactions. We derive the corresponding excitonic deformation potentials an…
Magnomechanical Coupling in Suspended 2D van der Waals Ferromagnets
Kavli Institute of Nanoscience, Delft University of Technology（代尔夫特理工大学卡弗里纳米科学研究所）；Department of Precision and Microsystems Engineering, Delft University of Technology（代尔夫特理工大学精密与微系统工程系）
Semiconducting 2D materials, such as transition metal dichalcogenides (TMDs), are emerging in nanomechanics, optoelectronics, and thermal transport. In each of these fields, perfect control over 2D material properties including strain, doping, and heating is necessary, especially on the nanoscale. Here, we study clean devices consisting of membranes of single-layer MoS2 suspended on pillar arrays. Using Raman and photoluminescence spectroscopy, we have been able to extract, separate and simulate the different contributions on the nanoscale and to correlate these to the pillar array design. Thi…
We report on the fabrication and characterization of an optimized comb-drive actuator design for strain-dependent transport measurements on suspended graphene. We fabricate devices from highly p-doped silicon using deep reactive ion etching with a chromium mask. Crucially, we implement a gold layer to reduce the device resistance from $\approx51.6$ k$\mathrmΩ$ to $\approx236$ $\mathrmΩ$ at room temperature in order to allow for strain-dependent transport measurements. The graphene is integrated by mechanically transferring it directly onto the actuator using a polymethylmethacrylate membrane. …
Hybrid systems consisting of a quantum emitter coupled to a mechanical oscillator are receiving increasing attention for fundamental science and potential applications in quantum technologies. In contrast to most of the presented works, in which the oscillator eigenfrequencies are irreversibly determined by the fabrication process, we present here a simple approach to obtain frequency-tunable mechanical resonators based on suspended nanomembranes. The method relies on a micromachined piezoelectric actuator, which we use both to drive resonant oscillations of a suspended Ga(Al)As membrane with …
In rhombohedral-stacked few-layer graphene, the very flat energy bands near the charge neutrality point are unstable to electronic interactions, giving rise to states with spontaneous broken symmetries. Using transport measurements on suspended rhombohedral-stacked tetralayer graphene, we observe an insulating ground state with a large interaction-induced gap up to 80 meV. This gapped state can be enhanced by a perpendicular magnetic field, and suppressed by an interlayer potential, carrier density, or a critical temperature of ~ 40 K.
We show that when the pseudomagnetic fields created by long wavelength deformations are appropriately coupled with a scalar electric potential, a significant energy gap can emerge due to the formation of a Haldane state. Ramifications of this physical effect are examined through the study of various strain geometries commonly seen in experiments, such as strain superlattices and wrinkled suspended graphene. Of particular technological importance, we consider setup where this gap can be tunable through electrostatic gates, allowing for the design of electronic devices not realizable with other …
We fabricate and investigate high quality graphene devices with contactless, suspended top gates, and demonstrate formation of graphene pnp junctions with tunable polarity and doping levels. The device resistance displays distinct oscillations in the npn regime, arising from the Fabry-Perot interference of holes between the two pn interfaces. At high magnetic fields, we observe well-defined quantum Hall plateaus, which can be satisfactorily fit to theoretical calculations based on the aspect ratio of the device.
Coupled nanomechanical resonators made of two-dimensional materials are promising for processing information with mechanical modes. However, the challenge for these types of systems is to control the coupling. Here, we demonstrate strong coupling of motion between two suspended membranes of the magnetic 2D material FePS$_3$. We describe a tunable electromechanical mechanism for control over both the resonance frequency and the coupling strength using a gate voltage electrode under each membrane. We show that the coupling can be utilized for transferring data from one drum to the other by ampli…
Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we show a graphene-integrated electromechanical system consisting of two physically separated mechanical resonators -- a comb-drive actuator and a suspended silicon beam -- that are tunably coupled by a graphene membrane. The graphene membrane, moreover, provid…
We have fabricated and tested mechanical resonators consisting of a single-atomic-layer of graphene deposited on suspended silicon nitride membranes. With the addition of the graphene layer we retain the desirable mechanical properties of silicon nitride but utilize the electrical and optical properties of graphene to transduce resonant motion by both optical and electrical means. By positioning the graphene-on-silicon-nitride drums in a tunable optical cavity we observe position dependent damping and resonant frequency control of the devices due to optical absorption by graphene.
We present a tunable phononic crystal which undergoes a phase transition from mechanically insulating to mechanically transmissive (metallic). Specifically, in our simulations for a phononic lattice under biaxial tension ($σ_{xx} =σ_{yy}$ = 0.01 N$/$m), we find a bandgap for out-of-plane phonons in the range of 48.8 - 56.4 MHz, which we can close by increasing the degree of tension uniaxiality ($σ_{xx} / σ_{yy}$) to 1.7. To manipulate the tension distribution, we design a realistic device of finite size, where $σ_{xx} / σ_{yy}$ is tuned by applying a gate voltage to a phononic crystal made fro…
There are a number of theoretical proposals based on strain engineering of graphene and other two-dimensional materials, however purely mechanical control of strain fields in these systems has remained a major challenge. The two approaches mostly used so far either couple the electrical and mechanical properties of the system simultaneously or introduce some unwanted disturbances due to the substrate. Here, we report on silicon micro-machined comb-drive actuators to controllably and reproducibly induce strain in a suspended graphene sheet, in an entirely mechanical way. We use spatially resolv…
Near-field radiative heat transfer (NFRHT) is strongly related with many applications such as near-field imaging, thermos-photovoltaics and thermal circuit devices. The active control of NFRHT is of great interest since it provides a degree of tunability by external means. In this work, a magnetically tunable multi-band NFRHT is revealed in a system of two suspended graphene sheets at room temperature. It is found that the single-band spectra for B=0 split into multi-band spectra under an external magnetic field. Dual-band spectra can be realized for a modest magnetic field (e.g., B=4 T). One …
We study the ground-state cooling of a mechanical oscillator linearly coupled to the charge of a quantum dot inserted between a normal metal and a superconducting contact. Such a system can be realized, e.g., by a suspended carbon nanotube quantum dot with a capacitive coupling to a gate contact. Focusing on the subgap transport regime, we analyze the inelastic Andreev reflections which drive the resonator to a nonequilibrium state. For small coupling, we obtain that vibration-assisted reflections can occur through two distinct interference paths. The interference determines the ratio between …
Light-matter interaction in optomechanical systems is the foundation for ultra-sensitive detection schemes [1,2] as well as the generation of phononic and photonic quantum states [3-10]. Electromechanical systems realize this optomechanical interaction in the microwave regime. In this context, capacitive coupling arrangements demonstrated interaction rates of up to 280 Hz [11]. Complementary, early proposals [12-15] and experiments [16,17] suggest that inductive coupling schemes are tunable and have the potential to reach the vacuum strong-coupling regime. Here, we follow the latter approach b…
We perform transport measurements in high quality bilayer graphene pnp junctions with suspended top gates. At a magnetic field B=0, we demonstrate band gap opening by an applied perpendicular electric field, with an On/Off ratio up to 20,000 at 260mK. Within the band gap, the conductance decreases exponentially by 3 orders of magnitude with increasing electric field, and can be accounted for by variable range hopping with a gate-tunable density of states, effective mass, and localization length. At large B, we observe quantum Hall conductance with fractional values, which arise from equilibrat…
We explore the tunability of the phonon polarization in suspended uniaxially strained graphene by magneto-phonon resonances. The uniaxial strain lifts the degeneracy of the LO and TO phonons, yielding two cross-linearly polarized phonon modes and a splitting of the Raman G peak. We utilize the strong electron-phonon coupling in graphene and the off-resonant coupling to a magneto-phonon resonance to induce a gate-tunable circular phonon dichroism. This, together with the strain-induced splitting of the G peak, allows us to controllably tune the two linearly polarized G mode phonons into circula…
We study the optomechanical coupling of a single-layer graphene with a high-Q Fabry-Perot microcavity in the membrane-in-the-middle configuration. In ordinary dissipative coupling systems, mechanical oscillators modulate the loss associated with the input coupling of the cavity mode; while in our system, the graphene oscillator couples dissipatively with the cavity mode through modulating its absorption loss. By analyzing the effects of the interband transition of a graphene suspended near the node of the cavity field, we obtain strong and tunable dissipative coupling without excessively reduc…
When electrons are confined in two dimensions and subjected to strong magnetic fields, the Coulomb interactions between them become dominant and can lead to novel states of matter such as fractional quantum Hall liquids. In these liquids electrons linked to magnetic flux quanta form complex composite quasipartices, which are manifested in the quantization of the Hall conductivity as rational fractions of the conductance quantum. The recent experimental discovery of an anomalous integer quantum Hall effect in graphene has opened up a new avenue in the study of correlated 2D electronic systems, …
Dissipative acousto-mechanical parametric interface between high-overtone acoustics and flexural phonons
Beijing Academy of Quantum Information Sciences（北京量子信息科学研究院）；Institute of Physics, Chinese Academy of Sciences（中国科学院物理研究所）；University of Chinese Academy of Sciences（中国科学院大学）；Aalto University（阿尔托大学）；Tsinghua University（清华大学）
