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arXiv 2103.06776math.AP
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带铰接顶板的三维MEMS自由边界模型II:抛物情形

On a Free Boundary Model for Three-Dimensional MEMS with a Hinged Top Plate II: Parabolic Case

Katerina Nik

摘要:

研究了三维静电MEMS器件的抛物型自由边界问题。该装置由刚性接地板和在其边界处铰接的弹性顶板制成,板保持在不同的电压下。该模型耦合了一个四阶半线性抛物型方程的顶板变形的拉普拉斯方程的静电势的设备。耦合的强度由参数$λ$调节,该参数与所施加的电压差的平方成比例。证明了该模型在时间上是局部适定的,并且对于足够小的$λ$,解在时间上是全局存在的。此外,接地的顶板上的地板被证明是唯一可能的有限时间奇异性。

英文摘要:

A parabolic free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at different voltages. The model couples a fourth-order semilinear parabolic equation for the deformation of the top plate to a Laplace equation for the electrostatic potential in the device. The strength of the coupling is tuned by a parameter $λ$ which is proportional to the square of the applied voltage difference. It is proven that the model is locally well-posed in time and that, for $λ$ sufficiently small, solutions exist globally in time. In addition, touchdown of the top plate on the ground plate is shown to be the only possible finite time singularity.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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