arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2103.06772math.AP
收藏

带铰接顶板的三维MEMS的自由边界模型Ⅰ:静止情况

On a Free Boundary Model for Three-Dimensional MEMS with a Hinged Top Plate I: Stationary Case

Katerina Nik

摘要:

研究了三维静电MEMS器件的稳态自由边界问题。该装置由刚性接地板和在其边界处铰接的弹性顶板制成,板保持在不同的电压下。该模型耦合一个非局部的四阶方程的顶板变形的拉普拉斯方程的两个板之间的自由域中的静电势。耦合的强度由参数$λ$调节,该参数与所施加的电压差的平方成比例。对于小的$λ$值,建立了稳定的稳态解的存在性.当$λ$足够大时,得到了稳定解的不存在性.

英文摘要:

A stationary free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at different voltages. The model couples a nonlocal fourth-order equation for the deformation of the top plate to a Laplace equation for the electrostatic potential in the free domain between the two plates. The strength of the coupling is tuned by a parameter $λ$ which is proportional to the square of the applied voltage difference. Existence of a stable stationary solution is established for small values of $λ$. Nonexistence of stationary solutions is obtained when $λ$ is large enough.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑