arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2103.05797cond-mat.mtrl-sci
收藏

相关电子透明导电氧化物SrVO3的固相外延生长

Solid phase epitaxial growth of the correlated-electron transparent conducting oxide SrVO3

Samuel D. Marks, Lin Lin, Peng Zuo, Patrick J. Strohbeen, Ryan Jacobs, Dongxue Du, Jason R. Waldvogel, Rui Liu, Donald E. Savage, John H. Booske, Jason K. Kawas… 展开作者

Samuel D. Marks, Lin Lin, Peng Zuo, Patrick J. Strohbeen, Ryan Jacobs, Dongxue Du, Jason R. Waldvogel, Rui Liu, Donald E. Savage, John H. Booske, Jason K. Kawasaki, Susan E. Babcock, Dane Morgan, Paul G. Evans

摘要:

采用固相外延法(SPE)从非晶层中晶化出具有高品质因数的SrVO 3薄膜,该薄膜可用作透明导体。使用SPE在SrTiO 3上结晶的外延SrVO 3膜对于60 nm厚的膜表现出2.5 × 10-5欧姆cm的室温电阻率、3.8的剩余电阻率比和0.5以上的可见光透射率。SrVO 3层在室温下使用射频溅射以非晶形式沉积,随后通过在受控气体环境中加热结晶。晶格参数和镶嵌角宽度的X射线反射从结晶的薄膜是一致的部分弛豫的应变导致的外延之间的不匹配SrVO 3和SrTiO 3。SPE的动力学的反射高能电子衍射研究表明,结晶发生通过热激活的结晶/非晶界面的传播,类似于SPE现象在其他钙钛矿氧化物。热力学计算的基础上密度泛函理论预测的温度和氧分压的条件下产生的SrVO 3相,并与实验相一致。在SPE中单独控制沉积和结晶条件为复杂几何形状和大面积透明导体的结晶提供了新的可能性。

英文摘要:

SrVO3 thin films with a high figure of merit for applications as transparent conductors were crystallized from amorphous layers using solid phase epitaxy (SPE). Epitaxial SrVO3 films crystallized on SrTiO3 using SPE exhibit a room temperature resistivity of 2.5 x 10-5 Ohms cm, a residual resistivity ratio of 3.8, and visible light transmission above 0.5 for a 60 nm-thick film. SrVO3 layers were deposited at room temperature using radio-frequency sputtering in an amorphous form and subsequently crystallized by heating in controlled gas environment. The lattice parameters and mosaic angular width of x-ray reflections from the crystallized films are consistent with partial relaxation of the strain resulting from the epitaxial mismatch between SrVO3 and SrTiO3. A reflection high-energy electron diffraction study of the kinetics of SPE indicates that crystallization occurs via the thermally activated propagation of the crystalline/amorphous interface, similar to SPE phenomena in other perovskite oxides. Thermodynamic calculations based on density functional theory predict the temperature and oxygen partial pressure conditions required to produce the SrVO3 phase and are consistent with the experiments. The separate control of deposition and crystallization conditions in SPE presents new possibilities for the crystallization of transparent conductors in complex geometries and over large areas.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑