一种新的材料科学与工程应用纳米层析成像装置
A Novel Nano Tomography Setup for Material Science and Engineering Applications
摘要：
在对几个样品的综合研究中，我们证明了我们基于实验室的计算机断层成像系统分辨率可达150 nm。通过对常见测试结构的二维成像和三维体的傅里叶壳相关性验证了所实现的分辨率。作为当今材料研究的代表性应用实例，我们展示了多层集成电路中的金属化工艺、锂电池电极的老化以及复合材料的金属亚微米填料的体积。因此，我们的实验室系统提供了独特的可能性，图像非破坏性结构在数百纳米范围内，即使是高密度材料。
英文摘要：
In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell Correlation of 3D volumes. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, ageing in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of com-posites. Thus, our laboratory system provides the unique possibility to image non-destructively struc-tures in the range of hundred nanometers, even for high density materials.
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