导电薄膜的电阻层析成像
Electrical Resistance Tomography of Conductive Thin Films
摘要：
电阻层析成像（ERT）技术被应用于测量均匀和图案化导电薄膜的薄层电导图。图像的片电导的空间分布，并获得局部电导率值。测试样品是玻璃基板上的氧化锡膜，在样品边界上具有电接触，一些样品被故意图案化，以诱导已知几何形状的零电导率区，而另一些样品包含更高的电导率夹杂物。四端接触之间的电阻测量进行扫描设置。基于全变分正则化和L曲线法的数值算法进行ERT重建。ERT正确地成像样品的片电导空间分布。重建的电导值是在良好的定量协议与独立的测量进行的范德堡和四点探针法。
英文摘要：
The Electrical Resistance Tomography (ERT) technique is applied to the measurement of sheet conductance maps of both uniform and patterned conductive thin films. Images of the sheet conductance spatial distribution, and local conductivity values are obtained. Test samples are tin oxide films on glass substrates, with electrical contacts on the sample boundary, some samples are deliberately patterned in order to induce null conductivity zones of known geometry while others contain higher conductivity inclusions. Four-terminal resistance measurements among the contacts are performed with a scanning setup. The ERT reconstruction is performed by a numerical algorithm based on the total variation regularization and the L-curve method. ERT correctly images the sheet conductance spatial distribution of the samples. The reconstructed conductance values are in good quantitative agreement with independent measurements performed with the van der Pauw and the four-point probe methods.
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