使用400万像素混合光电计数探测器实现快速实验室纳米级X射线断层扫描
Using a 4-megapixel hybrid photon counting detector for fast, lab-based nanoscale x-ray tomography
AI总结：
本研究利用400万像素混合光电计数探测器实现快速实验室纳米级X射线断层扫描，将成像速度提升800倍，达到75-80nm的空间分辨率。
摘要：
混合光电计数探测器（HPCDs）在过去30年中为全球同步辐射装置的X射线测量解锁了新的能力。通过利用独立优化的传感器和读出层，它们提供了高量子效率（>80%）、超低暗计数、亚像素点扩散函数和高计数率（>10^6个每像素每秒）。此外，它们的小像素尺寸和大有效面积使其在实空间和倒空间成像中具有出色的覆盖能力和分辨率。在此，我们证明HPCDs也适合实验室纳米级X射线断层扫描（nano-xCT）。我们对在130nm工艺节点制造的集成电路进行了nano-xCT，并产生了具有40倍更多光子的3D重建，比本组之前的实验快20倍，整体速度提升800倍。我们回顾了使用HPCD进行台式断层扫描的技术考虑。我们使用已建立的指标量化重建图像质量，包括调制传递函数（MTF）、傅里叶壳相关性（FSC）和对比度噪声比（CNR），以验证我们选择的实验参数是否提供了足够的分辨率和成像速度。使用这些指标，我们确定在当前实验条件下，160nm布线特征可以以75-80nm的空间分辨率进行重建。
英文摘要：
Hybrid photon counting detectors (HPCDs) have unlocked new capabilities for x-ray-based measurements at synchrotrons around the world in the last 30 years. By leveraging independently optimized sensor and readout layers, they offer high quantum efficiency ($> 80 \%$), ultra-low dark counts, sub-pixel point-spread function, and high count rates ($> 10^{6}$ counts per pixel per second). Furthermore, their small pixel size and large active area endow them with excellent coverage and resolution for both real-space and reciprocal space imaging. Here, we demonstrate that HPCDs are also well-suited for laboratory-based nanoscale x-ray tomography (nano-xCT). We perform nano-xCT on an integrated circuit fabricated at the 130-nm node and produce a 3D reconstruction with 40 times more photons collected 20 times faster than in this group's previous work, for an overall speedup of 800$\times$. We review the technical considerations of using an HPCD for tabletop tomography. We quantify our reconstruction image quality using well-established metrics, including the modulation transfer function (MTF), Fourier shell correlation (FSC), and contrast-to-noise (CNR), to validate our choice of experimental parameters that provide sufficient resolution and imaging speed. Using these metrics, we determine that even under current experimental conditions, 160 nm wiring features are reconstructed at 75-80 nm spatial resolution.
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