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arXiv 2010.03435physics.opticsphysics.app-ph
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大面积光束耦合光栅的研制

Fabrication Development of a Large Area Grating for Out of Plane Beam Coupling

Jonathan Trisno, Tong Hua Lee, Parvathi Nair S., You Sin Tan, Ray J. H. Ng, Yingyan Huang, Seng Tiong Ho, Joel K. W. Yang

摘要:

我们开发了一种单层波导表面光栅结构,用于将波长约为1.55 μ m的近红外(NIR)光从绝缘体上硅(SOI)衬底上的大面积(约100 μ m长度尺度)硅波导垂直耦合到自由空间,以用于高功率激光应用。我们的设计方法是基于优化的本地发射角和出耦合强度。仿真结果表明,在所需的焦点位置处可以实现具有3.82 μ m的1/e2宽度的焦斑,具有33%(-4.81 dB)的模拟源到自由空间聚焦效率,而初始测量显示效率为22%(-6.58 dB)。

英文摘要:

We develop a single-layer waveguide surface grating structure to vertically couple near infrared (NIR) light at ~1.55 um wavelength from a large area (~100 um length scale) Si waveguide on a Silicon-On-Insulator (SOI) substrates to free-space for high-power laser applications. Our design approach is based on the optimization of local emission angles and the out-coupling intensities. Simulation results show that a focal spot with a 1/e2 width of 3.82 um can be achieved at the desired focal position, with 33% (-4.81 dB) simulated source to free-space focusing efficiency, while initial measurements show an efficiency of 22% (-6.58 dB).

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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