倒折射率对比光栅镜的概念及通过3D微打印的示范性制造
Concept of Inverted Refractive-Index-Contrast Grating Mirror and Exemplary Fabrication by 3D Microprinting
AI总结：
本文提出倒折射率对比光栅（ICG）作为DBR的紧凑单层替代方案，通过数值模拟和3D微打印实验证明其可实现近全反射、偏振鉴别与相位调谐，并适用于任意包层材料。
摘要：
高反射镜是各种先进光子器件中不可或缺的组件。通常使用的体积庞大的多层分布式布拉格（DBR）反射器仅限于晶格匹配的半导体或非导电介质。在此，我们引入一种倒折射率对比光栅（ICG），作为DBR的紧凑单层替代方案。在ICG中，由低折射率材料制成的亚波长一维光栅被制作在高折射率包层上。我们的数值模拟表明，只要光栅的折射率超过1.75，无论包层的折射率如何，ICG都能为从包层一侧入射的光提供近乎全光功率反射。此外，ICG还能实现反射光和透射光的偏振鉴别与相位调谐，这是DBR无法实现的特性。我们实验演示了一种根据所提设计制造的验证性ICG，采用3D微打印技术，在Si包层上沉积IP-Dip光刻胶的细条纹。这种一步法避免了费力且常具破坏性的基于刻蚀的光栅结构化工艺，使得可以在任意包层材料上实现该光栅。
英文摘要：
Highly reflective mirrors are indispensable components in a variety of state-of-the-art photonic devices. Typically used, bulky, multi-layered distributed Bragg (DBR) reflectors are limited to lattice-matched semiconductors or nonconductive dielectrics. Here, we introduce an inverted refractive-index-contrast grating (ICG), as compact, single layer alternative to DBR. In the ICG, a subwavelength one-dimensional grating made of a low refractive index material is implemented on a high refractive index cladding. Our numerical simulations show that the ICG provides nearly total optical power reflectance for the light incident from the side of the cladding whenever the refractive index of the grating exceeds 1.75, irrespective of the refractive index of the cladding. Additionally, the ICG enables polarization discrimination and phase tuning of the reflected and transmitted light, the property not achievable with the DBR. We experimentally demonstrate a proof-of-concept ICG fabricated according to the proposed design, using the technique of 3D microprinting in which thin stripes of IP-Dip photoresist are deposited on a Si cladding. This one-step method avoids laborious and often destructive etching-based procedures for grating structuration, making it possible to implement the grating on any arbitrary cladding material.
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